首页> 外国专利> Preparation of doped gallium arsenide single crystal, useful to produce gallium arsenide substrate wafer, comprises melting gallium arsenide starting material and subsequently making the gallium arsenide melts

Preparation of doped gallium arsenide single crystal, useful to produce gallium arsenide substrate wafer, comprises melting gallium arsenide starting material and subsequently making the gallium arsenide melts

机译:用于生产砷化镓衬底晶片的掺杂砷化镓单晶的制备包括熔化砷化镓起始材料,然后使砷化镓熔化

摘要

Preparation of doped gallium arsenide single crystal, comprises melting gallium arsenide starting material and subsequently making the gallium arsenide melts, where the gallium arsenide melt contains an excess of gallium in comparison with the stoichiometric composition, and the boron concentration in the melt or in the crystal is at least 5x 10 1 7cm - 3. An independent claim is included for the gallium arsenide single crystal with a charge carrier concentration of at least 1x 10 1 6cm - 3or 1x 10 1 5cm - 3and a maximum of 1x 10 1 8cm - 3and an optical absorption coefficient of 2.5 or 2 cm - 1at a wavelength of 1000 nm, more than 1.8 or 1.4 cm - 1at a wavelength of 1100 nm and a maximum of 0.8 or 1 cm - 1at a wavelength of 1200 nm.
机译:掺杂砷化镓单晶的制备包括熔化砷化镓原料,然后使砷化镓熔体熔化,其中与化学计量组成相比,砷化镓熔体中含有过量的镓,并且熔体或晶体中的硼浓度至少为5x 10 1> 7> cm-> 3>。砷化镓单晶的载流子浓度至少为1x 10 1> 6> cm-> 3>或1x 10 1> 5> cm-> 3>且最大值为1x 10 1> 8> cm-> 3>,并且在1000 nm波长处的光吸收系数为2.5或2 cm-> 1>,大于1.8或1.4 cm-> 1>在1100 nm处的波长,最大为0.8或在1200 nm波长下为1 cm-> 1>。

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