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首页> 外文期刊>Journal of Mechanical Science and Technology >Development of multiple performance indices and system parameter study for the design of a MEMS accelerometer
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Development of multiple performance indices and system parameter study for the design of a MEMS accelerometer

机译:MEMS加速度计设计的多个性能指标的开发和系统参数的研究

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摘要

For the design of a MEMS accelerometer, proper performance indices should be defined and employed. Performance indices are obtained using either an experimental method or a numerical method. In the present study, a vibration analysis model of a MEMS accelerometer is introduced to calculate three performance indices: sensitivity, measurable acceleration range, and measurable frequency range. The accuracy of the vibration analysis model is first validated by comparing its modal and transient results with those of a commercial finite element code. Measurable acceleration and frequency ranges versus allowable errors for electrical and mechanical sensitivities are obtained and the effects of system parameter variations on the three performance indices are investigated.
机译:对于MEMS加速度计的设计,应定义并采用适当的性能指标。使用实验方法或数值方法可以获得性能指标。在本研究中,引入了MEMS加速度计的振动分析模型来计算三个性能指标:灵敏度,可测量的加速度范围和可测量的频率范围。首先通过将其模态和瞬态结果与商业有限元代码的模态和瞬态结果进行比较,来验证振动分析模型的准确性。获得了可测量的加速度和频率范围与电气和机械灵敏度的允许误差,并研究了系统参数变化对三个性能指标的影响。

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