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首页> 外文期刊>Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films >Enhanced retained dose uniformity in NiTi spinal correction rod treated by three-dimensional mesh-assisted nitrogen plasma immersion ion implantation
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Enhanced retained dose uniformity in NiTi spinal correction rod treated by three-dimensional mesh-assisted nitrogen plasma immersion ion implantation

机译：三维网状辅助氮等离子体浸没离子注入处理后的NiTi脊柱矫正棒保留剂量均匀性增强

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摘要

Owing to the nonconformal plasma sheath in plasma immersion ion implantation of a rod sample, the retained dose can vary significantly. The authors propose to improve the implant uniformity by introducing a metal mesh. The depth profiles obtained with and without the mesh are compared and the implantation temperature at various locations is evaluated indirectly by differential scanning calorimeter. Our results reveal that by using the metal mesh, the retained dose uniformity along the length is greatly improved and the effects of the implantation temperature on the localized mechanical properties of the implanted NiTi shape memory alloy rod are nearly negligible.
机译：由于棒状样品的等离子体浸没离子注入中的非共形等离子体鞘层，保留剂量可能会有很大变化。作者提出通过引入金属网来改善植入物的均匀性。比较使用和不使用网格的深度分布，并通过差示扫描量热仪间接评估各个位置的注入温度。我们的结果表明，通过使用金属网，沿长度方向的保留剂量均匀性大大提高，并且注入温度对植入的NiTi形状记忆合金棒的局部力学性能的影响几乎可以忽略不计。

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