Fabrication of Si field emitter array in local vacuum package

Daiji Noda; Masanori Hatakeyama; Masanori Kyogoku; Kimiya Ikushima; Kazuaki Sawada; Makoto Ishida

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Fabrication of Si field emitter array in local vacuum package

机译：用局部真空封装制造硅场致发射器阵列

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We have fabricated a local vacuum package enclosing a Si field emitter array on Si substrate. To maintain the low pressure required for electron emission, a titanium evaporation getter was made as a bridge structure with the Si field emitter array in local vacuum package. The local vacuum package technique was adapted to the IC process for on-chip device fabrication. This technique will be very useful for many applications with high performance.

机译：我们已经制造了局部真空封装，在Si基板上封装了一个Si场发射器阵列。为了保持电子发射所需的低压，用局部真空封装中的Si场发射器阵列制作了钛蒸发吸气剂作为桥结构。局部真空封装技术适用于片上器件制造的IC工艺。对于许多具有高性能的应用程序，此技术将非常有用。

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《Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures》 |2005年第2期|p.864-867|共4页
作者
Daiji Noda; Masanori Hatakeyama; Masanori Kyogoku; Kimiya Ikushima; Kazuaki Sawada; Makoto Ishida;
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作者单位

Venture Business Laboratory, Toyohashi University of Technology, 1-1 Hibargaoka, Tempaku-cho, Toyohashi 441-8580, Japan;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
原文格式 PDF
正文语种 eng
中图分类工程物理学;
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1. Fabrication of local microvacuum package incorporating Si field emitter array and Ti getter [J] . Daiji Noda, Masanori Hatakeyama, Kichinosuke Nishijyou, Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures . 2007,第3期

机译：结合硅场致发射体阵列和钛吸气剂的局部微真空封装的制作
2. Fabrication and field emission performance of arrays of vacuum microdiodes containing CuO nanowire emitters grown directly on glass without a catalyst [J] . SHAO PengRui, DENG ShaoZhi, CHEN Jun, 中国科学通报：英文版 . 2011,第009期

机译：含CuO纳米线发射体的真空微二极管阵列的制备和场发射性能，无需催化剂即可直接在玻璃上生长
3. A new fabrication process of field emitter arrays with submicron gate apertures using local oxidation of silicon [J] . Chun Gyoo Lee, Byung Gook Park IEEE Electron Device Letters . 1996,第3期

机译：利用硅局部氧化的亚微米栅孔场发射器阵列的新制造工艺
4. Fabrication of local micro vacuum package incorporating Si field emitter array and Ti getter [C] . Daiji Noda, Masanori Hatakeyama, Kichinosuke Nishijyou, 第19届真空微纳国际年会塈第50届场致发射国际会议 . 2006

机译：结合了硅场发射器阵列和钛吸气剂的局部微真空封装的制造
5. Fabrication, field emission properties and theoretical simulation of triode-type carbon nanotube emitter arrays. [D] . Wu, Jianfeng. 2010

机译：三极管型碳纳米管发射极阵列的制备，场发射特性和理论模拟。
6. Design Fabrication and Characterization of Molybdenum Field Emitter Arrays (Mo-FEAs) [O] . Ningli Zhu, Jing Chen 2017

机译：钼场发射极阵列（Mo-FEA）的设计制造和表征
7. Fabrication and field emission performance of arrays of vacuum microdiodes containing CuO nanowire emitters grown directly on glass without a catalyst [O] . PengRui Shao, ShaoZhi Deng, Jun Chen, 2010

机译：含CuO纳米线发射极的真空微二极管阵列的制备和场发射性能，无需催化剂即可直接在玻璃上生长
8. Investigation of Field Emitter Array Vacuum Microtriodes for Space Electronics Applications [R] . Smith, Mark A., Kapoor, Vik J. 1997

机译：用于空间电子应用的场发射器阵列真空微棒的研究

Fabrication of Si field emitter array in local vacuum package

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