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首页> 外文期刊>Journal of Vacuum Science & Technology >Stability of deflected-beam metal–insulator–metal tunneling cathodes under high acceleration voltage
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Stability of deflected-beam metal–insulator–metal tunneling cathodes under high acceleration voltage

机译：高加速电压下偏转电子束-绝缘体-金属隧穿阴极的稳定性

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摘要

Metal–insulator–metal (MIM) tunneling cathodes have advantageous features, such as areal electron beams and robustness to surface contamination. Therefore, they are suitable for field-emission displays. This paper reports the long-term stability of MIM tunneling cathodes in display panels operating under a high acceleration voltage (anode voltage). A preliminary life test was carried out using conventional display panels, which consisted of a phosphor-coated anode plate and a cathode plate having matrix-arrayed cathodes. The life test indicated that the pace at which cathodes degrade increases significantly when the acceleration voltage exceeds a few kilovolts. This high-voltage (HV)-induced degradation is presumably attributed to cathodes being bombarded by positive ions originating from residual gases. To suppress HV-induced degradation, the authors propose the concept of a deflected-beam cathode, in which electron beams are deflected so that the recoiling ions fail to hit the cathode. This concept was implemented by introducing deflector electrodes in the cathode plate, thereby forming an electron lens in each pixel. As 6-μm high scan lines were used as the deflector electrodes in this design, the deflected-beam cathodes could be fabricated only by modifying the pattern of the scan lines. The authors also present a simulation-based design procedure using an emitter-landing diagram, which facilitates analysis of the margins for the deflected-beam cathodes. The deflected-beam cathodes thus designed were incorporated into 3.8 cm-diagonal test panels to confirm the validity of the concept. The degree of beam deflection that was observed was in excellent agreement with the results obtained from simulation. A life test extending over a 20 000-h period demonstrated that the HV-induced degradation was suppressed with the deflected-beam MIM cathodes.
机译：金属-绝缘体-金属（MIM）隧道阴极具有有利的功能，例如面电子束和对表面污染的耐受性。因此，它们适合于场发射显示器。本文报告了在高加速电压（阳极电压）下运行的显示面板中MIM隧穿阴极的长期稳定性。使用传统的显示面板进行初步寿命测试，该显示面板由涂有磷的阳极板和具有矩阵排列阴极的阴极板组成。寿命测试表明，当加速电压超过几千伏时，阴极退化的速度会大大增加。这种高压（HV）引起的降解可能归因于阴极受到源自残余气体的正离子轰击。为了抑制HV引起的退化，作者提出了偏转电子束阴极的概念，其中电子束发生偏转，以使反冲离子无法撞击阴极。通过在阴极板中引入偏转电极，从而在每个像素中形成电子透镜来实现该概念。由于在此设计中使用6μm高的扫描线作为偏转电极，因此只能通过修改扫描线的图案来制造偏转束阴极。作者还介绍了使用发射极着陆图的基于仿真的设计程序，该程序有助于分析偏转电子束阴极的裕量。将如此设计的偏转电子束阴极结合到3.8 cm对角线的测试面板中，以确认该概念的有效性。观察到的光束偏转程度与从模拟获得的结果非常吻合。超过20,000小时的寿命测试表明，偏转光束的MIM阴极抑制了HV引起的退化。

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  • 来源
    《Journal of Vacuum Science & Technology》 |2013年第4期|1-8|共8页
  • 作者

    Suzuki Mutsumi; Kusunoki Toshiaki;

  • 作者单位

    Hitachi Research Laboratory, Hitachi, Ltd., Omika-cho 7-1-1, Hitachi-shi, Ibaraki 319-1292, Japan|c|;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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  • 正文语种 eng
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