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首页> 外文期刊>Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures >Suspended slab and photonic crystal waveguides in lithium niobate
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Suspended slab and photonic crystal waveguides in lithium niobate

机译：铌酸锂中的悬浮平板和光子晶体波导

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摘要

Suspended waveguides have been widely applied to silicon-on-insulator structures because they are easily fabricated with processing techniques similar to those of integrated circuit design. However, it is difficult to fabricate such structures in lithium niobate, which is also a very important material for optoelectronics. One main challenge is the difficulty of etching lithium niobate. In this work, the authors show a method to fabricate suspended slab waveguides in lithium niobate by combining ion implantation, focused ion beam milling, and selective wet etching techniques. The method does not involve wafer bonding or crystal ion slicing and is entirely monolithic. Lattice damage can be introduced to a buried thin layer of a certain depth beneath the sample surface by ion implantation, resulting in a considerable wet etching selectivity to bulk material. The etching rate has been investigated to control the size of the suspended membrane. Fabrication of suspended photonic crystal waveguides has also been demonstrated. The results show an effective method of fabricating suspended devices in lithium niobate, which enables new applications such as waveguides, modulators, and infrared detectors.
机译：悬浮波导已经被广泛地应用于绝缘体上硅结构，因为它们可以通过类似于集成电路设计的加工技术轻松制造。然而，难以在铌酸锂中制造这种结构，铌酸锂对于光电子学也是非常重要的材料。一个主要挑战是蚀刻铌酸锂的难度。在这项工作中，作者展示了一种通过结合离子注入，聚焦离子束铣削和选择性湿法蚀刻技术在铌酸锂中制造悬浮平板波导的方法。该方法不涉及晶片键合或晶体离子切片，并且完全是整体的。可以通过离子注入将晶格损伤引入到样品表面下方一定深度的埋入薄层中，从而导致对块状材料的相当大的湿法蚀刻选择性。已经研究了蚀刻速率以控制悬浮膜的尺寸。还已经证明了悬挂式光子晶体波导的制造。结果表明，在铌酸锂中制造悬挂器件的有效方法，使诸如波导，调制器和红外探测器等新应用成为可能。

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