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首页> 外文期刊>Journal of Vacuum Science & Technology >Selective growth of tungsten oxide nanowires via a vapor-solid process
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Selective growth of tungsten oxide nanowires via a vapor-solid process

机译:通过气固工艺选择性生长氧化钨纳米线

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摘要

Selective growth of tungsten oxide nanowires has been achieved using a vapor-solid (VS) process without the assistance of any catalysts. To achieve selective growth, low vapor supersaturation was employed to suppress the spontaneous nucleation of tungsten oxide during the VS process, and patterned tungsten coating was introduced to provide seed nuclei, which promotes the growth of tungsten oxide nanowires and control their growth sites. Patterned tungsten oxide nanowire arrays have been fabricated using simple patterning methods, such as shadow mask and laser-induced nanograting growth. The effects of the source heating temperature and the growth temperature on the nanowire growth have been investigated, showing the morphology of tungsten oxide deposition was sensitive to the vapor supersaturation controlled by both temperatures.
机译:氧化钨纳米线的选择性生长已使用气固(VS)工艺实现,无需任何催化剂的帮助。为了实现选择性生长,在VS过程中采用低蒸气过饱和来抑制氧化钨的自发成核,并引入图案化的钨涂层以提供晶种核,从而促进氧化钨纳米线的生长并控制其生长位置。图案化的氧化钨纳米线阵列已使用简单的图案化方法制造,例如荫罩和激光诱导的纳米光栅生长。研究了源加热温度和生长温度对纳米线生长的影响,表明氧化钨沉积的形态对这两个温度控制的蒸气过饱和敏感。

著录项

  • 来源
    《Journal of Vacuum Science & Technology》 |2010年第2期|310-315|共6页
  • 作者单位

    Department of Mechanical Engineering and Engineering Science, The University of North Carolina at Charlotte, Charlotte, North Carolina 28223;

    Department of Mechanical Engineering and Engineering Science, The University of North Carolina at Charlotte, Charlotte, North Carolina 28223;

    Department of Physics and Optical Science, The University of North Carolina at Charlotte, Charlotte,North Carolina 28223;

    Department of Physics and Optical Science, The University of North Carolina at Charlotte, Charlotte,North Carolina 28223;

    NUANCE Center, Northwestern University, Evanston, Illinois 60208;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
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