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Electrical conductivity of ultra-thin silicon nanowires

机译:超薄硅纳米线的电导率

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摘要

The authors present results on fabricating ultra-thin silicon nanowires on insulators and characterizing their electrical conductivity. The silicon nanowires were fabricated by atomic force microscopy lithography on ultra-thin (8 nm) silicon on insulator substrates. At such minute thicknesses, the device exhibits high sensitivity to the charges trapped at the Si/SiO_2 interface. This leads to an unusual behavior of the electrical conductivity of the nanowires as a function of drain-source and gate voltages.
机译:作者介绍了在绝缘体上制造超薄硅纳米线并表征其导电性的结果。硅纳米线是通过原子力显微镜平版印刷术在绝缘体基板上的超薄(8 nm)硅上制造的。在如此小的厚度下,该器件对在Si / SiO_2界面处捕获的电荷表现出很高的敏感性。这导致纳米线的电导率随漏极-源极和栅极电压的变化而出现异常行为。

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