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首页> 外文期刊>Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures >Impact of the environmental conditions on the electrical characteristics of scanning spreading resistance microscopy
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Impact of the environmental conditions on the electrical characteristics of scanning spreading resistance microscopy

机译：环境条件对扫描扩展电阻显微镜电特性的影响

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摘要

Within this study, the authors have investigated scanning spreading resistance microscopy (SSRM) measurements on silicon samples under different environmental conditions. The authors have mainly focused on the possibility to reduce the required force for obtaining a stable electrical contact between the probe and the sample, and to improve the reproducibility of the technique by cleaving and measuring the samples in a controlled ambient. The authors demonstrate that, by measuring samples that were cleaved and maintained in nitrogen (N_2) ambient, the force needed for a stable electrical contact between the probe and the sample was reduced by more than a factor of 3 when compared to the force required in air. This leads to an improved signal to noise ratio and enhanced reproducibility with remaining variations now below 10% for n-type as well as p-type samples. At the same time, tip requirements are relaxed and tip lifetime is improved. Our work has demonstrated that in situ SSRM is a very good candidate to fulfill the stringent ITRS requirements for two-dimensional carrier profiling.
机译：在这项研究中，作者研究了在不同环境条件下对硅样品进行的扫描扩展电阻显微镜（SSRM）测量。作者主要集中于减少在探针与样品之间获得稳定电接触所需的力，以及通过在受控环境中切割和测量样品来提高技术的可重复性的可能性。作者证明，通过测量裂解并保持在氮气（N_2）环境中的样品，与样品中所需的力相比，探针与样品之间稳定电接触所需的力降低了三倍以上。空气。这导致改进的信噪比和增强的重现性，对于n型和p型样品，其剩余变化现在低于10％。同时，放宽了烙铁头的要求，并改善了烙铁头的使用寿命。我们的工作表明，就地二维SSRM而言，SSRM是满足严格ITRS要求的很好的候选者。

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