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Size Effect on Tensile Strength of Surface-Micromachined Al-3%Ti Thin Films

机译：尺寸对表面微机械加工Al-3％Ti薄膜拉伸强度的影响

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摘要

A new tensile tester using an electromagnetic-force actuator (voice coil) was developed to measure the mechanical characteristics of surface-micromachined thin film materials. The tester has a load cell with maximum capacity of 0.5N and a non-contact position measuring system based on the principle of capacitance micrometry with 0.1nm resolution for displacement measurement. The tester was applied for tensile testing of Al-3%Ti thin films with dimensions of 1000 μm long, 50-480 μm wide and 1.0 and 1.1 μm thick. The Al-3%Ti is commonly used in RF(radio frequency) microelectromechanical systems(MEMS) switch. The specimen with holes and bridges was designed for easy tensile test. The holes at center of grip end are able to make alignment and gripping easy. The bridges are to remove the side supports easily and extract specimen from wafer without sawing. It was found that the mean tensile strengths of Al-3%Ti are 140-380MPa, depending on the width of specimens and converging to a certain tensile strength as the width decreases.
机译：开发了一种使用电磁力执行器（语音线圈）的新型拉伸测试仪，以测量表面微机械加工的薄膜材料的机械特性。该测试仪具有一个最大容量为0.5N的称重传感器和一个基于电容测微原理的非接触式位置测量系统，分辨率为0.1nm，用于位移测量。该测试仪用于Al-3％Ti薄膜的拉伸测试，该薄膜的尺寸为长1000μm，宽50-480μm，厚1.0和1.1μm。 Al-3％Ti通常用于RF（射频）微机电系统（MEMS）开关中。带有孔和桥的标本旨在轻松进行拉伸测试。握持端中心的孔能够使对准和握持变得容易。桥接件可轻松卸下侧支架，并在不进行锯切的情况下从晶片上提取样品。结果发现，Al-3％Ti的平均抗拉强度为140-380MPa，这取决于试样的宽度，并随着宽度的减小而收敛到一定的抗拉强度。

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