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首页> 外文期刊>Materials Chemistry and Physics. >Influence of the annealing conditions on the structure of BaCe_(1_x)Y_xO_(3_α) coatings elaborated by DC magnetron sputtering at room temperature
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Influence of the annealing conditions on the structure of BaCe_(1_x)Y_xO_(3_α) coatings elaborated by DC magnetron sputtering at room temperature

机译：退火条件对室温下直流磁控溅射制备的BaCe_（1_x）Y_xO_（3_α）涂层结构的影响

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摘要

BaCe_(1_x)Y_xO_(3_α) coatings were synthesised by magnetron co-sputtering of metallic targets in the presence of reactive argon-oxygen gas mixtures. This material appears to be a valuable candidate for electrolyte in the novel concept of proton conductor fuel cells. In our knowledge, the single study concerning the deposition of this material was performed by radiofrequency sputtering of a perovskite target. In the present study, we focus on its feasibility by reactive magnetron (co-)sputtering. Hence, a first set of experiments was carried out using a single metallic target with the convenient metal content (Ba0.50Ce0.45Y0.05) for the deposition of perovskite structure coatings. Whatever the deposition conditions, the cerium concentration in the coating is very low in comparison with that of the target. In a second set of experiments, the films were synthesised by co-deposition of Ce_(0.9)Y_(0.1) and Ba metallic targets to increase their Ce content. The composition of the coatings was then controlled by the discharge parameters. Whatever their composition in the range (Ce + Y)/Ba between 0.3 and 1.1, as-deposited coatings are amorphous and those with higher Ba content present a poor chemical stability against carbonation or hydration. As-deposited coatings with the convenient Ba content, i.e. Ba/(Ce + Y)～1, are also amorphous. They crystallise after annealing around 873 K for 2 h under air in a mixture of BaCO_3 and CeO_2 in spite of the targeted Y-substituted BaCeO_3 perovskite structure. Nevertheless, the crystallisation in the convenient perovskite structure was obtained after annealing under vacuum to prevent the carbonation of the coating.
机译：BaCe_（1_x）Y_xO_（3_α）涂层是在反应性氩氧气体混合物的存在下，通过磁控共溅射金属靶材合成的。在质子导体燃料电池的新概念中，这种材料似乎是电解质的有价值的候选者。据我们所知，有关这种材料沉积的单一研究是通过钙钛矿靶材的射频溅射进行的。在本研究中，我们集中在通过反应磁控（共）溅射的可行性上。因此，使用具有方便金属含量（Ba0.50Ce0.45Y0.05​​）的单一金属靶材进行钙钛矿结构涂层沉积的第一组实验。无论沉积条件如何，与靶材相比，涂层中的铈浓度都非常低。在第二组实验中，通过共沉积Ce_（0.9）Y_（0.1）和Ba金属靶以增加其Ce含量来合成薄膜。然后通过排放参数控制涂层的组成。无论它们的组成（Ce + Y）/ Ba在0.3到1.1之间，沉积态的涂层都是无定形的，而Ba含量较高的涂层对碳化或水合的化学稳定性很差。 Ba含量方便，即Ba /（Ce + Y）〜1的沉积态涂层也是无定形的。尽管有目标Y取代的BaCeO_3钙钛矿结构，它们在873 K下在空气中于BaCO_3和CeO_2的混合物中退火2 h后仍会结晶。然而，在方便的钙钛矿结构中的结晶是在真空下退火后获得的，以防止涂层碳化。

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