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Luminescence hydrogenated nanoamorphous Si films fabricated by reactive pulsed laser ablation

机译：反应性脉冲激光烧蚀制备的发光氢化纳米非晶硅薄膜

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摘要

Hydrogenated nanoamorphous Si (na-Si:H) films have been fabricated by reactive pulsed laser ablation technique with hydrogen as reactive gas. It is found that the hydrogen pressure has a great effect on both the structure and photoluminescence (PL) properties of the films. Increasing the hydrogen pressure leads to a structural transition of the films from amphorous Si to na-Si:H, and the PL center wavelength of the na-Si:H films is varied with the hydrogen pressure. The PL decay times of the na-Si:H films are in the nanosecond scale and are shorter on the high energy side of their PL spectrum. The results demonstrate that the na-Si:H films are promising candidates for visible, tunable and high-performance light-emitting devices.
机译：通过以氢为反应气体的反应性脉冲激光烧蚀技术制备了氢化的纳米非晶硅（na-Si：H）薄膜。发现氢压力对薄膜的结构和光致发光（PL）性能都有很大影响。氢压力的增加导致膜从无定形的Si向na-Si：H的结构转变，并且na-Si：H膜的PL中心波长随氢压力而变化。 na-Si：H薄膜的PL衰减时间在纳秒级，在PL光谱的高能侧较短。结果表明，na-Si：H薄膜有望成为可见光，可调光和高性能发光器件的候选材料。

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  • 来源
    《Materials Science and Engineering》 |2011年第11期|p.835-839|共5页
  • 作者

    Wanbing Lu; Xingkuo Li; Xinzhan Wang; Liping Wu; Li Han; Guangsheng Fu; Wei Yu;

  • 作者单位

    College of Physics Science and Technology, Hebei University, Baoding 071002, People's Republic of China;

    College of Physics Science and Technology, Hebei University, Baoding 071002, People's Republic of China;

    College of Physics Science and Technology, Hebei University, Baoding 071002, People's Republic of China;

    College of Physics Science and Technology, Hebei University, Baoding 071002, People's Republic of China;

    College of Physics Science and Technology, Hebei University, Baoding 071002, People's Republic of China;

    College of Physics Science and Technology, Hebei University, Baoding 071002, People's Republic of China;

    College of Physics Science and Technology, Hebei University, Baoding 071002, People's Republic of China;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Reactive pulsed laser ablation; Hydrogenated nanoamorphous Si; Photoluminescence;

    机译：反应性脉冲激光烧蚀;氢化纳米非晶硅;光致发光;

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