Properties of doped ZnO thin films grown by simultaneous dc and RF magnetron sputtering

D.R. Sahu

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Properties of doped ZnO thin films grown by simultaneous dc and RF magnetron sputtering

机译：直流和射频磁控溅射同时生长的掺杂ZnO薄膜的性能

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Doped ZnO films such as Cu- and Ag-doped with different at.% have been grown using simultaneous RF magnetron sputtering of ZnO and dc sputtering of Cu and Ag. The structural, electrical and optical properties of the films are investigated using different characterization tools. It is observed that both films show different surface morphologies with preferential crystalline growth orientation along (002). More significantly Ag-doped ZnO film show low resistance and high transmittance than that of Cu-doped film of same thickness and doped content. ZnO film doped with 2 at.% Cu shows high resistivity of the order 10~8 Ω cm.

机译：使用同时的ZnO射频磁控溅射和Cu和Ag的直流溅射已经生长了掺杂不同原子百分比的掺杂ZnO薄膜，例如铜和银。使用不同的表征工具研究了薄膜的结构，电学和光学性质。观察到两个膜都显示出不同的表面形态，并沿着（002）出现了优先的晶体生长取向。与相同厚度和掺杂量的铜掺杂薄膜相比，银掺杂ZnO薄膜显示出低电阻和高透射率。掺杂2 at。％Cu的ZnO膜显示出约10〜8Ωcm的高电阻率。

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来源
《Materials Science and Engineering》 |2010年第3期|P.99-103|共5页
作者
D.R. Sahu;
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作者单位

School of Physics and DST/NRF Center of Excellence in Strong Materials, University of the Witwatersrand, Private Bag 3, Wits 2050, Johannesburg, South Africa;

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正文语种 eng
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ZnO; sputtering; coatings; electrical and optical properties;

机译：氧化锌;溅射涂料;电学和光学性质;

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2. Effects of substrate temperature on the structural, morphological, electrical and optical properties of Al and Ga co-doped ZnO thin films grown by DC magnetron sputtering [J] . Zhu Ke, Yang Ye, Song Weijie Materials Letters . 2015,第apra15期

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3. Effect of ion beam assistance on Cu- doped ZnO thin films deposited by simultaneous RF and DC magnetron sputtering [J] . Sreedhar Adem, Jung Hyemin, Kwon Jin Hyuk, CERAMICS INTERNATIONAL . 2016,第2aPta2期

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5. Manufacturing gallium doped ZNO thin films suitable for use in thin film transistors using unbalanced magnetron sputtering. [D] . Jones, Timothy R. 2013

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6. Processing and Study of Optical and Electrical Properties of (Mg Al) Co-Doped ZnO Thin Films Prepared by RF Magnetron Sputtering for Photovoltaic Application [O] . Chayma Abed, Susana Fernández, Selma Aouida, 2020

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7. Structural, Optical and Electrical Properties of Cu doped ZnO Thin Films Grown by RF Magnetron Sputtering: Application to Solar Photocatalysis [O] . Bilel Khalfallah, I. Riahi, F. Chaabouni 2021

机译：RF磁控溅射生长的Cu掺杂ZnO薄膜的结构，光学和电性能：太阳能光催化的应用

Properties of doped ZnO thin films grown by simultaneous dc and RF magnetron sputtering

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