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Oxygen sensitivity of perovskite-type dielectric thin films

机译：钙钛矿型介电薄膜的氧敏感性

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摘要

We have considered perovskite-type dielectric materials as promising candidates for use as highly sensitive oxygen sensors because of the indispensable interaction between ionic polarization in perovskites and adsorbed oxygen on the perovskite surface. In this study, a gas calibration system equipped with a ZrO_2-based oxygen pump (SIOC-200C, STLAB, Japan) was used. Among the materials studied, Cr:SrTiO_3 shows sufficient sensitivity to detect residual oxygen in helium ambient at ppb levels. In contrast to CnSrTiO_3, Cr:BaTiO_3 shows no oxygen sensitivity. The merits of Cr:SrTiO_3 might be attributed to the coexistence of large and small polarons. Perovskite-based sensor is expected to provide a solution for real-time monitoring of residual oxygen during semiconductor manufacturing.
机译：由于钙钛矿中的离子极化与钙钛矿表面上的吸附氧之间必不可少的相互作用，我们已将钙钛矿型电介质材料视为高灵敏度氧传感器的有前途的候选材料。在这项研究中，使用了配备有基于ZrO_2的氧气泵的气体校准系统（SIOC-200C，日本STLAB）。在研究的材料中，Cr：SrTiO_3具有足够的灵敏度，可以检测ppb级氦气环境中的残留氧气。与CnSrTiO_3相比，Cr：BaTiO_3没有氧敏感性。 Cr：SrTiO_3的优点可能归因于大极化子和小极化子的共存。基于钙钛矿的传感器有望为半导体制造期间的残留氧实时监测提供解决方案。

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  • 来源
    《Materials Science and Engineering》 |2009年第3期|142-145|共4页
  • 作者

    Toru Hara; Takashi Ishiguro; Naoki Wakiya; Kazuo Shinozaki;

  • 作者单位

    Corporate Technology Planning Department, Research and Development Laboratory, Taiyo Yuden Co., Ltd., 8-1 Sakae-cho, Takasaki, Gunma 370-8522, Japan;

    Corporate Technology Planning Department, Research and Development Laboratory, Taiyo Yuden Co., Ltd., 8-1 Sakae-cho, Takasaki, Gunma 370-8522, Japan;

    Department of Materials Science, Faculty of Engineering, Shizuoka University, 3-5-1 Johoku, Hamamatsu City, Shizuoka 432-8561, Japan;

    Department of Metallurgy and Ceramics Science, Graduate School of Science and Engineering, Tokyo Institute of Technology, 2-12-1, O-okayama, Meguro, Tokyo 152 -8550, Japan;

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  • 正文语种 eng
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  • 关键词

    gas sensor; oxygen sensor; perovskite; thin film; polaron;

    机译：气体传感器氧传感器;钙钛矿薄膜;极化子;

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