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Modeling the Electrostatic Deflection of a MEMS Multilayers Based Actuator

机译：对基于MEMS多层执行器的静电挠度建模

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摘要

An actuator comprised of a rigid substrate and two parallel clamped-clamped microbeams is modeled under the influence of electrostatic loading. The problem is considered under the context of nonlinear Euler's mechanics, where the actuating system is described by coupled integrodifferential equations with relevant boundary conditions. Galerkin-based discretization is utilized to obtain a reduced-order model, which is solved numerically. Actuators with different gap sizes between electrode and beams are investigated. The obtained results are compared to simulations gotten by the finite-element commercial software ANSYS.
机译：在静电载荷的影响下，对由刚性基板和两个平行的夹紧微束组成的执行器进行建模。该问题是在非线性欧拉力学的背景下考虑的，其中通过结合相关边界条件的积分微分方程来描述驱动系统。利用基于Galerkin的离散化来获得降阶模型，该模型可以通过数值求解。研究了电极和电子束之间具有不同间隙尺寸的执行器。将获得的结果与有限元商业软件ANSYS进行的仿真进行比较。

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  • 来源
    《Mathematical Problems in Engineering》 |2013年第14期|959232.1-959232.6|共6页
  • 作者

    Hassen M. Ouakad; Mohammad A. Hawwa; Hussain M. Al-Qahtani;

  • 作者单位

    Department of Mechanical Engineering, King Fahd University of Petroleum & Minerals, Dhahran 31261, Saudi Arabia;

    Department of Mechanical Engineering, King Fahd University of Petroleum & Minerals, Dhahran 31261, Saudi Arabia;

    Department of Mechanical Engineering, King Fahd University of Petroleum & Minerals, Dhahran 31261, Saudi Arabia;

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