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首页> 外文期刊>Mechatronics, IEEE/ASME Transactions on >Development of Three-Dimensional Atomic Force Microscope for Sidewall Structures Imaging With Controllable Scanning Density
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Development of Three-Dimensional Atomic Force Microscope for Sidewall Structures Imaging With Controllable Scanning Density

机译：可控制扫描密度的侧壁结构成像的三维原子力显微镜的研制

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摘要

In this paper, a three-dimensional atomic force microscope (3-D AFM) for imaging of the micro- and nanoscale sidewall structures is presented. The system mainly consists of two individual scanners, each with two degrees of freedom to drive the probe on plane for the feedback control and the sample on plane for the raster scan. A slender optical fiber probe is used and can be laterally tilted with a rotary holder to access steep sidewalls with overhang or undercut features without any modification of the optical lever. Unlike the conventional AFM with the single-axis feedback control, the 3-D AFM is capable of tracking 3-D profiles of the sidewall structures with nonorthogonal scan due to the dual-axis feedback control with a vector probing scanning scheme. The motion vector angle of the probe is controllable, and varied according to the slope angle of the sample surface for accurate scan of the sidewall with a uniform image density. The 3-D AFM demonstrates great potential not only for characterization of 3-D surface topography, but also for critical dimension (CD) measurements of the sidewall structures. Three- dimensional imaging and CD measurement results of an AFM calibration grating, and a microcomb structure validate the capability and flexibility of the developed system.
机译：在本文中，提出了一种用于微观和纳米级侧壁结构成像的三维原子力显微镜（3-D AFM）。该系统主要由两个单独的扫描仪组成，每个扫描仪具有两个自由度，可在平面上驱动探针进行反馈控制，并在平面上驱动样本进行光栅扫描。使用了细长的光纤探头，可以用旋转固定器将其横向倾斜，以进入具有悬垂或底切特征的陡峭侧壁，而无需对光杠杆进行任何修改。与具有单轴反馈控制的常规AFM不同，由于具有矢量探测扫描方案的双轴反馈控制，3-D AFM能够通过非正交扫描跟踪侧壁结构的3-D轮廓。探针的运动矢量角是可控制的，并且可以根据样品表面的倾斜角而变化，以精确扫描具有均匀图像密度的侧壁。 3-D AFM不仅在表征3-D表面形貌方面具有巨大潜力，而且在侧壁结构的临界尺寸（CD）测量中也具有巨大潜力。 AFM校准光栅的三维成像和CD测量结果以及微梳状结构验证了开发系统的功能和灵活性。

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