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首页> 外文期刊>Mechatronics, IEEE/ASME Transactions on >Real-Time Reconstruction of Multimode Tip Motion of Microcantilevers in Dynamic Atomic Force Microscopy
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Real-Time Reconstruction of Multimode Tip Motion of Microcantilevers in Dynamic Atomic Force Microscopy

机译：动态原子力显微镜中微悬臂梁多模尖端运动的实时重建

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摘要

A modal projection filtering method is proposed for the dynamic atomic force microscopy (AFM) to accurately reconstruct the multimode tip motion of the AFM microcantilever from the single measurement signal of the optical lever method in real time. The optical lever method is inherently a slope detection method, wherein each individual dynamic mode pertinent to the slope detection principle of the measurement system has its own distinct measurement sensitivity because of the unique dynamic mode shape per a mode. The proposed modal projection filtering method uses the experimentally identified multimode dynamic model of the AFM microcantilever along with the calibrated measurement sensitivities of individual dynamic modes to design the modal projection filters to extract the responses of individual dynamic modes from the single measurement signal. The tip motion of the AFM microcantilever is then accurately reconstructed by using a linear superposition of the extracted responses of multiple dynamic modes. The designed modal projection filters were implemented in a field programmable gate array for real-time computation with an update rate of 1 MHz. Computer simulations and experimental investigations were performed to validate the principle of and to demonstrate the performance of the proposed method.
机译：提出了一种用于动态原子力显微镜（AFM）的模态投影滤波方法，以根据光杠杆方法的单个测量信号实时准确地重构AFM微悬臂梁的多模尖端运动。光学杠杆方法本质上是一种斜率检测方法，其中，与测量系统的斜率检测原理相关的每个单独的动态模式都具有自己独特的测量灵敏度，这是因为每个模式具有独特的动态模式形状。所提出的模态投影滤波方法使用了实验确定的AFM微悬臂梁的多模态动态模型以及各个动态模式的校准测量灵敏度来设计模态投影滤波器，以从单个测量信号中提取各个动态模式的响应。然后，通过使用多个动态模式的提取响应的线性叠加，精确地重建AFM微悬臂梁的尖端运动。设计的模态投影滤波器在现场可编程门阵列中实现，以1 MHz的更新速率进行实时计算。进行了计算机仿真和实验研究，以验证该方法的原理并证明其性能。

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