Real-Time Compensation of Simultaneous Errors Induced by Optical Phase Difference and Substrate Motion in Scanning Beam Laser Interference Lithography System

著录项

• 来源
  《IEEE / ASME Transactions on Mechatronics》 |2018年第4期|1491-1500|共10页
• 作者

  Minsoo Kim; Changsu Park; Soonkyu Je; Hoseung Jang; Chulmin Joo; Shinill Kang;

  展开▼
• 作者单位

  National Center for Optically-Assisted Mechanical System, School of Mechanical Engineering, Yonsei University, Seoul, South Korea;

  National Center for Optically-Assisted Mechanical System, School of Mechanical Engineering, Yonsei University, Seoul, South Korea;

  National Center for Optically-Assisted Mechanical System, Graduate School of Information Storage Device, Yonsei University, Seoul, South Korea;

  National Center for Optically-Assisted Mechanical System, School of Mechanical Engineering, Yonsei University, Seoul, South Korea;

  National Center for Optically-Assisted Mechanical System, School of Mechanical Engineering, Yonsei University, Seoul, South Korea;

  National Center for Optically-Assisted Mechanical System, School of Mechanical Engineering, Graduate School of Information Storage Device, Yonsei University, Seoul, South Korea;

  展开▼
• 收录信息
• 原文格式 PDF
• 正文语种 eng
• 中图分类
• 关键词

  Laser beams; Mirrors; Interference; Adaptive optics; Measurement by laser beam; Substrates; Real-time systems;

  机译：激光束;反射镜;干涉;自适应光学;通过激光束进行测量;基板;实时系统;