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Effects of temperature and catalysts on the synthesis of carbon nanotubes by chemical vapor deposition

机译：温度和催化剂对化学气相沉积合成碳纳米管的影响

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Carbon nanotubes were produced on a quartz plate and a silicon wafer by chemical vapor deposition using xylene as a carbon resource, iron and cobalt as catalysts, and ammonia as a reactive gas. A series of experiments was carried out to investigate the effects of reaction temperature, substrates, and catalysts on the synthesis of the nanotubes. The TEM analyses revealed that the nanotubes had a typical bamboo-shaped inner layer structure. Ammonia gas was found to have played a very important role in producing such bamboo-shaped CNTs by easing the formation of the graphite layers due to the catalyst activator and amorphous carbon reducer. The growth of CNTs was affected by the thickness of the silicon oxide layer. With iron catalysts, the growth of CNTs increased with an increase in the thickness of the silicon oxide layer. However, an opposite phenomenon occurred with the use of cobalt catalysts.
机译：使用二甲苯作为碳源，铁和钴作为催化剂，氨作为反应气体，通过化学气相沉积法在石英板和硅片上生产碳纳米管。进行了一系列实验以研究反应温度，底物和催化剂对纳米管合成的影响。 TEM分析表明，纳米管具有典型的竹形内层结构。通过催化剂活化剂和无定形碳还原剂，通过减轻石墨层的形成，发现氨气在生产这种竹形CNT中起了非常重要的作用。 CNT的生长受氧化硅层的厚度影响。使用铁催化剂，CNT的生长随着氧化硅层厚度的增加而增加。然而，使用钴催化剂发生了相反的现象。

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