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首页> 外文期刊>Journal of Microelectromechanical Systems >Surface Texture Detection With a New Sub-mm Resolution Flexible Tactile Capacitive Sensor Array for Multimodal Artificial Finger
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Surface Texture Detection With a New Sub-mm Resolution Flexible Tactile Capacitive Sensor Array for Multimodal Artificial Finger

机译：表面纹理检测，具有新的亚mm分辨率柔性触觉电容传感器阵列，用于多模式人工指

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摘要

This work presents a flexible polyimide-based capacitive tactile sensing array with sub-millimeter spatial resolution. The sensor is conceived to be embedded in a multimodal artificial finger to detect and classify the texture morphology of an object's surface. The proposed tactile sensor comprises a 16 x 16 array of capacitive sensing units. Each unit is composed of a parallel square electrode pairs (340 mu m x 340 mu m) separated by a compressible air cavity and embedded into a flexible polyimide substrate. Standard MEMS microfabrication techniques were used to develop the sensor. The polyimide device was covered with a thin compressible PDMS layer to tune the normal pressure sensitivity and dynamic range (225-430 mu m thin PDMS layer resulting in 0.23-0.14 fF/kPa). The detection of the surface morphologies of a regular grating stamp for different orientation and a small metallic nut placed on the sensor is demonstrated, showing a 420 mu m spatial resolution. The proposed sensor represents a novel capacitive tactile sensing device with a sub-mm resolution of human fingertip sensitivity.
机译：该工作介绍了一种具有柔性聚酰亚胺基电容性触觉传感阵列，具有亚毫米空间分辨率。设想传感器嵌入多峰人工指中以检测并分类物体表面的纹理形态。所提出的触觉传感器包括16×16阵列的电容传感单元。每个单元由由可压缩空腔分离的平行方电极对（340μm×340μmm m m m m m m m m m m m m m m m m m m m m m m m m m m m m m m m m m m m m m m m m m m m m m m m m m m m m m m m m m m m m m m mμm标准MEMS微型制备技术用于开发传感器。用薄可压缩的PDMS层覆盖聚酰亚胺装置，可以调整正常压力灵敏度和动态范围（225-430μm薄PDMS层，导致0.23-0.14 ff / kPa）。证明了用于不同取向的规则光栅标记的表面形态和放置在传感器上的小金属螺母的表面形态，显示出420μm的空间分辨率。所提出的传感器表示具有人指尖敏感性的亚mm分辨率的新型电容性触觉传感装置。

著录项

  • 来源
    《Journal of Microelectromechanical Systems》 |2020年第5期|629-636|共8页
  • 作者

    Sotgiu Edoardo; Aguiam Diogo E.; Calaza Carlos; Rodrigues Jose; Fernandes Jose; Pires Bernardo; Moreira Eurico Esteves; Alves Filipe; Fonseca Helder; Dias Rosana; Martins Sofia; Gaspar Joao;

  • 作者单位

    Int Iberian Nanotechnol Lab Micro & Nanofabricat Dept P-4715330 Braga Portugal|Univ Minho Azurem Algoritmi Ctr P-4800058 Guimaraes Portugal;

    Int Iberian Nanotechnol Lab Micro & Nanofabricat Dept P-4715330 Braga Portugal|Univ Minho Azurem Algoritmi Ctr P-4800058 Guimaraes Portugal;

    Int Iberian Nanotechnol Lab Micro & Nanofabricat Dept P-4715330 Braga Portugal;

    Int Iberian Nanotechnol Lab Micro & Nanofabricat Dept P-4715330 Braga Portugal|Univ Minho Azurem Algoritmi Ctr P-4800058 Guimaraes Portugal;

    Int Iberian Nanotechnol Lab Micro & Nanofabricat Dept P-4715330 Braga Portugal;

    Int Iberian Nanotechnol Lab Micro & Nanofabricat Dept P-4715330 Braga Portugal;

    Int Iberian Nanotechnol Lab Micro & Nanofabricat Dept P-4715330 Braga Portugal|Univ Minho Azurem Algoritmi Ctr P-4800058 Guimaraes Portugal;

    Int Iberian Nanotechnol Lab Micro & Nanofabricat Dept P-4715330 Braga Portugal|Univ Minho Azurem Algoritmi Ctr P-4800058 Guimaraes Portugal;

    Int Iberian Nanotechnol Lab Micro & Nanofabricat Dept P-4715330 Braga Portugal;

    Int Iberian Nanotechnol Lab Micro & Nanofabricat Dept P-4715330 Braga Portugal;

    Int Iberian Nanotechnol Lab Micro & Nanofabricat Dept P-4715330 Braga Portugal;

    Int Iberian Nanotechnol Lab Micro & Nanofabricat Dept P-4715330 Braga Portugal|Univ Minho Azurem Algoritmi Ctr P-4800058 Guimaraes Portugal;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Electrodes; Sensitivity; Capacitance; Surface morphology; Tactile sensors; Force; Tactile sensors; capacitance transducers; force measurement; sensor arrays; flexible electronics; polymer films; polyimides;

    机译：电极;灵敏度;电容;表面形态;触觉传感器;力;触觉传感器;电容传感器;力测量;传感器阵列;柔性电子;聚酰亚胺;聚酰亚胺;聚酰亚胺;聚酰亚胺;聚酰亚胺;聚酰亚胺;聚酰亚胺;聚酰亚胺;聚酰亚胺;聚酰亚胺;聚酰亚胺;

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