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首页> 外文期刊>Journal of Microelectromechanical Systems >Monolithically Fabricated Microgripper With Integrated Force Sensor for Manipulating Microobjects and Biological Cells Aligned in an Ultrasonic Field
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Monolithically Fabricated Microgripper With Integrated Force Sensor for Manipulating Microobjects and Biological Cells Aligned in an Ultrasonic Field

机译：具有集成力传感器的单片制造微抓取器，用于处理超声场中对准的微物体和生物细胞。

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摘要

This paper reports an electrostatic microelectromechanical systems (MEMS) gripper with an integrated capacitive force sensor. The sensitivity is more than three orders of magnitude higher than other monolithically fabricated MEMS grippers with force feedback. This force sensing resolution provides feedback in the range of the forces that dominate the micromanipulation process. A MEMS ultrasonic device is described for aligning microobjects suspended in water using ultrasonic fields. The alignment of the particles is of a sufficient accuracy that the microgripper must only return to a fixed position in order to pick up particles less than 100 mum in diameter. The concept is also demonstrated with HeLa cells, thus providing a useful tool in biological research and cell assays
机译：本文报道了带有集成电容式力传感器的静电微机电系统（MEMS）夹具。灵敏度比其他带有力反馈的单片制造MEMS抓取器高三个数量级以上。该力感测分辨率提供了支配微操纵过程的力范围内的反馈。描述了一种MEMS超声装置，其用于利用超声场对准悬浮在水中的微物体。颗粒的对准具有足够的精度，以使微抓爪仅必须返回到固定位置才能拾取直径小于100微米的颗粒。 HeLa细胞也证明了这一概念，从而为生物学研究和细胞测定提供了有用的工具

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