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首页> 外文期刊>Journal of Microelectromechanical Systems >Fracture testing of bulk silicon microcantilever beams subjected to a side load
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Fracture testing of bulk silicon microcantilever beams subjected to a side load

机译：承受侧向载荷的块状硅微悬臂梁的断裂测试

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摘要

A custom experimental system was developed to fracture silicon microcantilever beams in side loading (i.e., the load was applied in the noncompliant direction), and the resulting force/deflection (stiffness) characteristics were obtained. A finite element model of these structures was analyzed using ABAQUS, and the resulting model stiffness correlated well with the experimental data. Fracture types were divided into two categories, {111} and {110}, according to the type of silicon crystalline plane along which fracture occurred. The initiation location of each fracture type was identified. The fracture stress (strength) in the beam was obtained from the stress produced in the model at the fracture initiation site for a load equivalent to the experimental fracture force. Numerous beams were tested, and the statistical results were compiled. The distributions and statistical data from each of the fracture types were compared to each other and to previously acquired results from front/back loading (i.e., loading in the compliant direction) of these same structures. Side-loading results indicated that the {110} fracture type had a greater fracture strength than the {111} type. Based on a comparison of the side loading data with the front/back loading data, it was concluded that side wall roughness and especially the edge roughness greatly affected the fracture strength of the silicon micromechanical structures.
机译：开发了一种定制的实验系统，以使硅微悬臂梁在侧向载荷下断裂（即，载荷沿非顺应方向施加），并获得了所得的力/挠度（刚度）特性。使用ABAQUS对这些结构的有限元模型进行了分析，并且所得的模型刚度与实验数据很好地相关。根据发生断裂的硅晶面的类型，将断裂类型分为{111}和{110}两类。确定每种骨折类型的起始位置。梁的断裂应力（强度）是从模型在断裂起始位置产生的应力获得的，载荷等于实验断裂力。测试了许多光束，并汇总了统计结果。将来自每种裂缝类型的分布和统计数据相互比较，并与这些相同结构的前/后荷载（即顺应性方向的荷载）先前获得的结果进行比较。侧向加载结果表明，{110}断裂型比{111}型具有更大的断裂强度。通过将侧面载荷数据与前后载荷数据进行比较，可以得出结论，侧壁粗糙度，尤其是边缘粗糙度，极大地影响了硅微机械结构的断裂强度。

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