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Design and dynamics of a 3-DOF flexure-based parallel mechanism for micro/nano manipulation

机译:基于3自由度挠曲的微/纳米操纵并联机构的设计和动力学

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摘要

This paper presents the mechanical design and dynamics of a 3-DOF (degree of freedom) flexure-based parallel mechanism. Flexure hinges are used as the revolute joints to provide smooth and high accurate motion with nanometer level resolution. Three piezoelectric actuators are utilized to drive active links of the flexure-based mechanism. The inverse dynamics of the proposed mechanism is established by simplifying flexure hinges into ideal revolute joints with constant torsional stiffnesses. Finite element analysis is used to validate the performance of the proposed 3-DOF flexure-based parallel mechanism. The interaction between the actuators and the flexure-based mechanism is extensively investigated based on the established model. Experiments are carried out to verify the dynamic performance of the 3-DOF flexure-based mechanism.
机译:本文介绍了基于3-DOF(自由度)挠曲的并联机构的机械设计和动力学。挠性铰链用作旋转关节,以纳米级分辨率提供平稳,高精度的运动。利用三个压电致动器来驱动基于挠曲的机构的主动连杆。通过将挠性铰链简化为具有恒定扭转刚度的理想旋转接头,可以建立所提出机制的逆动力学。有限元分析用于验证所提出的基于3-DOF挠曲的并联机构的性能。基于所建立的模型,对致动器和基于挠曲的机构之间的相互作用进行了广泛的研究。进行实验以验证基于3-DOF挠曲的机构的动态性能。

著录项

  • 来源
    《Microelectronic Engineering》 |2010年第2期|230-241|共12页
  • 作者单位

    Robotics and Mechatronics Research Laboratory, Department of Mechanical and Aerospace Engineering, Monash University, Clayton, VIC 3800, Australia School of Mechanical Engineering, Tianjin University, Tianjin 300072, China;

    Robotics and Mechatronics Research Laboratory, Department of Mechanical and Aerospace Engineering, Monash University, Clayton, VIC 3800, Australia;

    School of Mechanical Engineering, Tianjin University, Tianjin 300072, China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    flexure hinge; mechanical design; dynamics; micro/nano manipulation;

    机译:挠性铰链;机械设计;动力学;微/纳操纵;

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