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Optimisation of silver paste for flexography printing on LTCC substrate

机译：用于在LTCC基板上进行柔性版印刷的银浆的优化

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摘要

The originality of this work consists in printing on ceramic tapes conductive silver tracks that reach a low resistivity by flexography process. Flexography is a solution for the mass production of multimaterial microdevices offering a huge potential of commercialisation in the near future. In order to test the flexography printing process for microelectronic application on Low Temperature Cofired Ceramic (LTCC) tapes, a screen printing paste was optimised to reach flexography printing requirements. Ink with 30% silver per weight was prepared and printed by flexography, roll to roll (R2R) process, on LTCC substrates. Three to five print passes were performed. Printed lines were sintered during 10 min at a peak temperature of 850 ℃ under normal air atmosphere. Conductive lines, with a mean width of 190 urn, a mean thickness of 1.50 μm and a resistivity of 2.8 × 10~(-8) Ω m close to bulk silver resistivity, were achieved after sintering.
机译：这项工作的独创性在于在陶瓷带上印刷导电银迹线，该导电银迹线通过柔版印刷工艺达到低电阻率。柔性版印刷是用于大规模生产多材料微器件的解决方案，在不久的将来具有巨大的商业化潜力。为了测试在低温共烧陶瓷（LTCC）胶带上微电子应用的柔版印刷工艺，对丝网印刷浆料进行了优化以满足柔版印刷的要求。制备了每重量含银30％的油墨，并通过柔性版印刷，卷对卷（R2R）工艺在LTCC基材上印刷。进行了三到五个打印过程。在正常空气气氛下，在850℃的峰值温度下，在10分钟内烧结印刷线路。烧结后，获得了平均宽度为190 um，平均厚度为1.50μm，电阻率为2.8×10〜（-8）Ωm的导电线，接近体银电阻率。

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  • 来源
    《Microelectronics & Reliability》 |2012年第7期|p.1483-1491|共9页
  • 作者

    Rita Faddoul; Nadege Reverdy-Bruas; Anne Blayo; Thomas Haas; Christian Zeilmann;

  • 作者单位

    Laboratory of Pulp and Paper Science and Graphic Arts, LCP2 UMR 5518, Saint Martin d'Heres, France;

    Laboratory of Pulp and Paper Science and Graphic Arts, LCP2 UMR 5518, Saint Martin d'Heres, France;

    Laboratory of Pulp and Paper Science and Graphic Arts, LCP2 UMR 5518, Saint Martin d'Heres, France;

    Micro Systems Engineering GmbH, Berg, Germany;

    Micro Systems Engineering GmbH, Berg, Germany;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
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