K-band capacitive MEMS switches on GaAs substrate: Design, fabrication, and reliability

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• 来源
  《Microelectronics & Reliability》 |2012年第10期|p.2245-2249|共5页
• 作者

  A. Persano; A. Tazzoli; P. Farinelli; G. Meneghesso; P. Siciliano; F. Quaranta;

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• 作者单位

  Institute for Microelectronics and Microsystems (IMM-CNR), Unit ofLecce, Via Monteroni, 73100 Lecce, Italy;

  University of Padova, Department of Information Engineering. Via Gradenigo 6/B, 35131 Padova, Italy,Carnegie Mellon University, Department of Electrical and Computer Engineering. Pittsburgh, PA 15213, USA;

  University of Perugia, Department of Electronic and Information Engineering, 06125 Perugia, Italy;

  Institute for Microelectronics and Microsystems (IMM-CNR), Unit ofLecce, Via Monteroni, 73100 Lecce, Italy,University of Padova, Department of Information Engineering. Via Gradenigo 6/B, 35131 Padova, Italy;

  Institute for Microelectronics and Microsystems (IMM-CNR), Unit ofLecce, Via Monteroni, 73100 Lecce, Italy;

  Institute for Microelectronics and Microsystems (IMM-CNR), Unit ofLecce, Via Monteroni, 73100 Lecce, Italy;

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• 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
• 原文格式 PDF
• 正文语种 eng
• 中图分类
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