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首页> 外文期刊>NDT & E international >Rubber-coupled acoustic microscopy for dry inspections of industrial products
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Rubber-coupled acoustic microscopy for dry inspections of industrial products

机译：橡胶耦合声学显微镜，用于工业产品的干检

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This paper describes the transduction of high-frequency ultrasound via rubber membranes. Four kinds of rubber membranes with Young's moduli of 0.91-9.59 MPa and thickness of 0.2mm are prepared, and the ultrasound exited with the 50MHz focused ultrasonic transducer is transmitted into the acrylic resin targets with various surface roughness through the membrane/target interfaces with an applied pressure of about 0.1 MPa. The rubber membrane with low Young's modulus realizes small coupling loss at the membrane/target interfaces, and the lateral resolution of the rubber-coupled acoustic microscopy is found to be governed by ultrasonic attenuation in the membrane. Finally, we repeatedly demonstrate the acoustic imaging of a semiconductor package in a dry environment via the selected membrane.
机译：本文介绍了通过橡胶膜的高频超声传导。制备四种杨氏模量为0.91-9.59 MPa，厚度为0.2mm的橡胶膜，并将通过50MHz聚焦超声换能器射出的超声通过具有不同表面粗糙度的膜/靶界面传输到具有各种表面粗糙度的丙烯酸树脂靶中。施加的压力约为0.1 MPa。杨氏模量低的橡胶膜在膜/目标界面处实现了较小的耦合损耗，并且橡胶耦合声学显微镜的横向分辨率受膜中超声衰减的支配。最后，我们通过选定的膜反复演示在干燥环境中的半导体封装的声学成像。

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