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Structural and optical properties of ZnO thin films grown by rapid atmospheric mist chemical vapor technique

机译：快速大气雾化化学汽相生长ZnO薄膜的结构和光学性质

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摘要

In this work, the effect of deposition time on the structural and optical properties of ZnO films deposited by Ultrasonic Spray Mist-CVD was studied aiming the application in perovskite solar cells, as holes blocking layer. Crystallinity, surface morphology and optical properties of the ZnO films were investigated by X-ray Diffraction (XRD), Scanning Electron Microscopy (SEM), Atomic Force Microscopy (AFM), conventional and Photoluminescence (PL) spectroscopies, respectively. The XRD measurement proves the existence of the hexagonal wurtzite phase and a high degree of crystallinity with [001] preferential orientation. The SEM study shows that the films possess a compact structure. Smooth and homogenous surface was confirmed also by AFM. The obtained results indicate that ZnO films deposited by a simple, safe and cost-effective method present a great potential for application in perovskite solar cells.
机译：在这项工作中，研究了超声波沉积Mist-CVD沉积时间对ZnO薄膜结构和光学性能的影响，旨在作为孔阻挡层在钙钛矿太阳能电池中的应用。分别通过X射线衍射（XRD），扫描电子显微镜（SEM），原子力显微镜（AFM），常规和光致发光（PL）光谱学研究了ZnO膜的结晶度，表面形态和光学性质。 XRD测量证明六方纤锌矿相的存在和具有[001]优先取向的高结晶度。 SEM研究表明该膜具有致密的结构。原子力显微镜也证实表面光滑且均匀。获得的结果表明，通过简单，安全和具有成本效益的方法沉积的ZnO膜在钙钛矿太阳能电池中具有广阔的应用前景。

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