Theoretical and experimental studies of the decorrelation residuals of the matrix-analysis three flat test

著录项

• 来源
  《Optical engineering》 |2018年第7期|074108.1-074108.10|共10页
• 作者

  Lingqiang Meng; Zhigang Han; Xiaoqin Shan;

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• 作者单位

  Nanjing University of Science and Technology, School of Electronic and Optical Engineering, Nanjing, China,Nanjing University of Science and Technology, MIIT Key Laboratory of Advanced Solid Laser, Nanjing, China;

  Nanjing University of Science and Technology, MIIT Key Laboratory of Advanced Solid Laser, Nanjing, China;

  Nanjing University of Science and Technology, Zijin College, Nanjing, China;

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• 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
• 原文格式 PDF
• 正文语种 eng
• 中图分类
• 关键词

  interferometry; absolute testing; flatness; decorrelation analysis;

  机译：干涉测量绝对测试;平整度解相关分析;