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Characterization of thin films and their structures in surface plasmon resonance measurements

机译：表面等离子体共振测量中薄膜及其结构的表征

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摘要

An approach to quantitative evaluation of surface plasmon resonance (SPR) measurements is given. In order to determine thicknesses and refractive indices, measured SPR curves were fitted numerically with a theoretical model based on the Fresnel equations. The model also takes into account additional roughness layers, representing real properties of the interfaces, which significantly improves the fitting accuracy. The intermediate layers have physical thicknesses and effective complex refractive indices, responsible for light losses at the interfaces. This model has been verified by direct measurement of surface roughness with the help of an atomic force microscope (AFM). It has turned out that the fitting procedure can reveal microstructures of a substrate and deposited layer, and when combined with the AFM for roughness measurement, this model can find simultaneously both the thickness and the refractive index of the metal film.
机译：给出了定量评估表面等离振子共振（SPR）测量的方法。为了确定厚度和折射率，将测量的SPR曲线与基于菲涅耳方程的理论模型进行了数值拟合。该模型还考虑了额外的粗糙层，这些粗糙层代表了界面的真实属性，从而大大提高了拟合精度。中间层具有物理厚度和有效的复折射率，导致界面处的光损失。该模型已通过借助原子力显微镜（AFM）直接测量表面粗糙度进行了验证。事实证明，拟合过程可以揭示衬底和沉积层的微观结构，并且当与AFM结合用于粗糙度测量时，该模型可以同时找到金属膜的厚度和折射率。

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