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Design guidelines for a guided-wave optical pressure sensor based on dependences of sensitivity and resonance frequency on diaphragm dimensions

机译：基于灵敏度和共振频率对膜片尺寸的依赖性的导波光学压力传感器的设计指南

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摘要

Design guidelines for a guided-wave optical pressure sensor based on dependences of sensitivity and resonance frequency on diaphragm dimensions were considered. The guided-wave optical pressure sensor consists of a diaphragm and a single-mode waveguide on the diaphragm. According to our theoretical study, the edge of the diaphragm was found to be the best position to obtain the highest sensitivity. Also, sensitivity is proportional to the cube of the side length of the diaphragm but inversely proportional to the square of the diaphragm thickness. On the other hand, resonance frequency of the diaphragm is proportional to the diaphragm thickness and inversely proportional to the square of the side length. Dependences were experimentally examined for fabricated sensors with different diaphragm dimensions to confirm theoretical predictions. The experimental results agreed well with the theoretical predictions. Moreover, a design assistant chart for the sensor was proposed based on the dependences.
机译：考虑了基于灵敏度和共振频率对膜片尺寸的依赖性的导波光学压力传感器的设计指南。导波光学压力传感器由膜片和膜片上的单模波导组成。根据我们的理论研究，发现膜片的边缘是获得最高灵敏度的最佳位置。同样，灵敏度与膜片边长的立方成正比，但与膜片厚度的平方成反比。另一方面，振动膜的共振频率与振动膜的厚度成正比，与边长的平方成反比。通过实验检查了具有不同膜片尺寸的传感器的相关性，以确认理论预测。实验结果与理论预测吻合良好。此外，基于相关性，提出了传感器的设计辅助图。

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