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Sensitivity dependence with respect to diaphragm thickness in guided-wave optical pressure sensor based on elasto-optic effect

机译：基于弹光效应的导波光学压力传感器对光阑厚度的灵敏度依赖性

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摘要

We experimentally investigated the relationship between sensitivity and diaphragm thickness in a glass-based guided-wave optical pressure sensor using intermodal interference between the fundamental TM-like and TE-like modes. The sensor consists of a rectangular diaphragm and a straight single-mode waveguide on the diaphragm. The sensitivity is theoretically known to be inversely proportional to the square of the diaphragm thickness. In this study, to examine this relationship, four sensors with diaphragm thicknesses of 0.30 mm, 0.22 mm, 0.20 mm, and 0.15 mm were fabricated. The area of the diaphragm was 10 mm × 10 mm. For the waveguide position nearest to the center of the diaphragm, the measured sensitivities almost agreed with the theoreticalrnones.
机译：我们使用基本的TM型和TE型模式之间的联运干扰，对基于玻璃的波导光学压力传感器中的灵敏度和膜片厚度之间的关系进行了实验研究。该传感器由矩形膜片和膜片上的直单模波导组成。从理论上讲，灵敏度与隔膜厚度的平方成反比。在本研究中，为检验这种关系，制造了四个膜片厚度分别为0.30 mm，0.22 mm，0.20 mm和0.15 mm的传感器。膜片的面积为10mm×10mm。对于最接近膜片中心的波导位置，测得的灵敏度几乎与理论值一致。

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  • 来源
    《Optical engineering》 |2008年第4期|044402.1-044402.5|共5页
  • 作者

    Hiroyuki Nikkuni; Yu Watanabe; Masashi Ohkawa; Takashi Sato;

  • 作者单位

    Niigata University Graduate School of Science and Technology 8050 Ikarashi 2-no-cho Nishi-ku, Niigata 950-2181, Japan;

    Niigata University Graduate School of Science and Technology 8050 Ikarashi 2-no-cho Nishi-ku, Niigata 950-2181, Japan;

    Niigata University Faculty of Engineering 8050 Ikarashi 2-no-cho Nishi-ku, Niigata 950-2181, Japan;

    Niigata University Faculty of Engineering 8050 Ikarashi 2-no-cho Nishi-ku, Niigata 950-2181, Japan;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    guided-wave optics; pressure sensor; diaphragm; glass waveguide; elasto-optic effect;

    机译：导波光学;压力传感器;光圈;玻璃波导弹光效应;

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