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Laser direct write of silicon nanowires

机译：激光直接写入硅纳米线

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摘要

Using laser direct writing in combination with chemical vapor deposition to produce nanometer scale electronics holds several advantages over current large scale photolithography methods. These include single step electrical interconnect deposition, mask-less patterning, and parallel processing. When taken together they make quick production of individualized electronic circuits possible. This work demonstrates the ability of combining laser direct write and chemical vapor deposition to produce silicon wires a few hundred nanometers wide. Optimized parameters will be discussed, with a particular emphasis paid to the laser-material interactions. The feasibility for electronic applications will be shown by examining the deposition formation on a silicon dioxide surface without degrading the surface's integrity, and by evaluating the resistivity of the deposited Silicon Wires.
机译：与当前的大规模光刻方法相比，结合使用激光直接写入和化学气相沉积来生产纳米级电子产品具有多个优势。这些包括单步电互连沉积，无掩模图案化和并行处理。在一起使用时，可以快速生产个性化的电子电路。这项工作证明了将激光直接写入与化学气相沉积相结合以生产几百纳米宽的硅线的能力。将讨论优化的参数，并特别强调激光与材料的相互作用。通过检查二氧化硅表面上的沉积物形成而不会降低表面的完整性，以及评估沉积的硅线的电阻率，将显示出电子应用的可行性。

著录项

  • 来源
    《Optical engineering》 |2011年第10期|p.104301.1-104301.5|共5页
  • 作者

    James I. Mitchell; Se Jun Park; C. Adam Watson; Pornsak Srisungsitthisunti; Chookiat Tansarawiput; Minghao Qi; Eric A. Stach; Chen Yang; Xianfan Xu;

  • 作者单位

    Purdue University Birck Nanotechnology Center School of Mechanical Engineering 1205 W State Street West Lafayette, Indiana 47907;

    Purdue University Birck Nanotechnology Center School of Mechanical Engineering 1205 W State Street West Lafayette, Indiana 47907;

    Purdue University Birck Nanotechnology Center School of Mechanical Engineering 1205 W State Street West Lafayette, Indiana 47907;

    Purdue University Birck Nanotechnology Center School of Mechanical Engineering 1205 W State Street West Lafayette, Indiana 47907;

    Purdue University Birck Nanotechnology Center School of Electrical and Computer Engineering 1205 W State Street West Lafayette, Indiana 47907;

    Purdue University Birck Nanotechnology Center School of Electrical and Computer Engineering 1205 W State Street West Lafayette, Indiana 47907;

    Purdue University Birck Nanotechnology Center School of Materials Science Engineering 1205 W State Street West Lafayette, Indiana 47907;

    Purdue University Birck Nanotechnology Center School of Chemistry 1205 W State Street West Lafayette, Indiana 47907;

    Purdue University Birck Nanotechnology Center School of Mechanical Engineering, and School of Electrical and Computer Engineering 1205 W State Street West Lafayette, Indiana 47907;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    laser applications; deposition; femtosecond phenomena; focal plane arrays;

    机译：激光应用;沉积飞秒现象;焦平面阵列;

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