New method to improve the accuracy in a sequential lateral shearing interferometer

Josep Vidal; Josep Nicolas; Juan Campos

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New method to improve the accuracy in a sequential lateral shearing interferometer

机译：提高顺序横向剪切干涉仪精度的新方法

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We present a new technique for measuring ultraprecise absolute optical surfaces. The technique combines the lateral shearing method but using a Fizeau interferometer. It achieves faster reconstructions than with a deflectometric system and without the influence of the reference surface. The system is limited by the imprecision of the linear stage and those of the estimation of the curvature of the reference surface. Regarding the guidance errors, we propose a new method to estimate pitch and roll based on data redundancy analysis. Numerical simulation results of pitch-and-roll estimations are given for realistic errors. Reconstructions using the sequential lateral shearing are also provided achieving nanometer accuracy.

机译：我们提出了一种用于测量超精密绝对光学表面的新技术。该技术结合了横向剪切方法，但使用了Fizeau干涉仪。与偏转系统相比，它实现了更快的重建，并且没有参考表面的影响。该系统受到线性平台的不精确性以及参考表面曲率估计的不精确性的限制。针对制导误差，我们提出了一种基于数据冗余分析的估计俯仰和侧倾的新方法。针对实际误差，给出了俯仰和横滚估计的数值模拟结果。还提供了使用顺序横向剪切的重建技术，可实现纳米精度。

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来源
《Optical engineering》 |2011年第11期|p.115601.1-115601.7|共7页
作者
Josep Vidal; Josep Nicolas; Juan Campos;
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作者单位

ALBA Synchrotron Light Source Experiments Carretera BP 1413, Km 3.3 Cerdanyola del Valles Barcelona 08290 Spain and Universitat Autonoma de Barcelona Department of Physics Bellaterra 08193 Spain;

ALBA Synchrotron Light Source Carretera BP 1413, Km 3.3Cerdanyola del Valles Barcelona 08290 Spain;

Department of PhysicsUniversitat Autonoma de Barcelona Bellaterra 08193 Spain;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种 eng
中图分类
关键词
metrology; interferometry; fourier optics; mirrors;

机译：计量干涉测量傅立叶光学镜子;

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专利

1. Experimental comparison of a liquid-crystal point-diffraction interferometer (LCPDI) and a commercial phase-shifting interferometer and methods to improve LCPDI accuracy [J] . Guardalben MJ., Ning L., Jain N., Applied optics . 2002,第7期

机译：液晶点衍射干涉仪（LCPDI）与商用相移干涉仪的实验比较以及提高LCPDI精度的方法
2. WAVE-FRONT ANALYSIS WITH HIGH ACCURACY BY USE OF A DOUBLE-GRATING LATERAL SHEARING INTERFEROMETER [J] . Leibbrandt GWR., Kunst PJ., Harbers G. Applied optics . 1996,第31期

机译：使用双光栅横向剪切干涉仪进行高精度波前分析
3. Liquid-crystal phase-shifting lateral shearing interferometer with improved fringe contrast for 3D surface profilometry [J] . Dalip Singh Mehta, Mohammad Inam, Jai Prakash, Applied optics . 2013,第25期

机译：具有改善的条纹对比度的液晶相移横向剪切干涉仪，用于3D表面轮廓测量
4. Large-aperture high-accuracy lateral shearing interferometer utilizing a Twyman-Green interferometer [C] . An Z. He, East China Institute of Technology, Nanjing, Current Developments in Optical Design and Optical Engineering . 1991

机译：利用Twyman-Green干涉仪的大孔径高精度横向剪切干涉仪
5. A polarized lateral shearing interferometer and application for on-machine form error measurement of engineering surfaces. [D] . Liu, Xiaojun. 2003

机译：一种偏振横向剪切干涉仪及其在工程表面的机上误差测量中的应用。
6. Digital holographic microscopy based on a modified lateral shearing interferometer for three-dimensional visual inspection of nanoscale defects on transparent objects [O] . Kwang-Beom Seo, Byung-Mok Kim, Eun-Soo Kim 2014

机译：基于改进的横向剪切干涉仪的数字全息显微镜用于三维视觉检查透明物体上的纳米级缺陷
7. On improving the accuracy of nonhomogeneous shear modulus identification in incompressible elasticity using the virtual fields method [O] . Yue Mei, Stéphane Avril 2019

机译：用虚拟字段方法提高不可压缩弹性中非均匀剪切模量识别的准确性
8. Applications of the Lateral Shearing Interferometer in Measurement of Synchrotron Radiation Optical Elements [R] . Liu, W. , Takacs, P. Z. , Siddons, D. P. 1987

机译：横向剪切干涉仪在同步辐射光学元件测量中的应用

New method to improve the accuracy in a sequential lateral shearing interferometer

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