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Measurement of small displacement based on surface plasmon resonance heterodyne interferometry

机译:基于表面等离子体共振外差干涉法的小位移测量

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This paper proposes an optical method for measuring small displacements using the surface plasmon resonance (SPR) heterodyne interferometry. A heterodyne light beam reflected by a mirror passes through a hemisphere glass and then enters into a surface plasmon resonance apparatus at the resonant angle. A small displacement of the mirror will introduce a phase-difference variation between p- and s-polarizations of the light emerging from the SPR apparatus. The phase-difference variation can be precisely measured with the heterodyne interferometric technique, and the associated displacement can be estimated. The feasibility of this method was verified by experiment, and the displacement measurement resolution of about 1.4 nm over a traveling range of 6 μm was achieved. Our method of measurement has the merits of both common-path interferometry and heterodyne interferometry.
机译:本文提出了一种使用表面等离振子共振(SPR)外差干涉测量法测量小位移的光学方法。由镜子反射的外差光束穿过半球玻璃,然后以共振角进入表面等离子体激元共振装置。反射镜的小位移将在从SPR装置发出的光的p偏振和s偏振之间引入相位差变化。可以使用外差干涉测量技术精确测量相差变化,并可以估算相关的位移。通过实验验证了该方法的可行性,在6μm的行进范围内实现了约1.4 nm的位移测量分辨率。我们的测量方法具有共径干涉测量法和外差干涉测量法的优点。

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