Sub-70 nm resolution tabletop microscopy at 13.8 nm using a compact laser–plasma EUV source

Przemyslaw W. Wachulak* Andrzej Bartnik and Henryk Fiedorowicz

首页> 外文期刊>Optics Letters >Sub-70 nm resolution tabletop microscopy at 13.8 nm using a compact laser–plasma EUV source

【24h】

Sub-70 nm resolution tabletop microscopy at 13.8 nm using a compact laser–plasma EUV source

机译：使用紧凑型激光等离子体EUV光源，在13.8 nm处具有低于70 nm的分辨率的台式显微镜

获取原文

获取原文并翻译 | 示例

掌桥外文数据库（机构版） >>

开具论文收录证明 >>

文献代查 >>

页面导航

摘要
著录项
相似文献
相关主题

摘要

We report the first (to our knowledge) demonstration of a tabletop, extreme UV (EUV) transmission microscope atn13:8 nm wavelength with a spatial (half-pitch) resolution of 69 nm. In the experiment, a compact laser–plasmanEUV source based on a gas puff target is applied to illuminate an object. A multilayer ellipsoidal mirror is used tonfocus quasi-monochromatic EUV radiation onto the object, while a Fresnel zone plate objective forms the image.nThe experiment and the spatial resolutionmeasurements, based on a knife-edge test, are described. The resultsmightnbe useful for the realization of a compact high-resolution tabletop imaging systems for actinic defect characterization.n© 2010 Optical Society of America

机译：我们报告了（在我们所知的情况下）台式，极紫外（EUV）透射显微镜的首次演示，该显微镜在13：8 nm波长处具有69 nm的空间（半间距）分辨率。在实验中，基于气扑目标的紧凑型激光-plasmanEUV源被用于照亮物体。多层椭圆镜用于将准聚焦EUV辐射聚焦到物体上，而菲涅耳波带片物镜则形成图像。n描述了基于刀口测试的实验和空间分辨率测量。该结果可能对于实现用于光化缺陷表征的紧凑型高分辨率台式成像系统很有用。n©2010美国光学学会

著录项

来源
《Optics Letters》 |2010年第14期|p.2337-2339|共3页
作者
Przemyslaw W. Wachulak* Andrzej Bartnik and Henryk Fiedorowicz;
展开▼
作者单位

Institute of Optoelectronics, Military University of Technology, 2 Kaliskiego Street, 00-908 Warsaw, Poland;

展开▼
收录信息
原文格式 PDF
正文语种 eng
中图分类
关键词

相似文献

外文文献
中文文献
专利

1. Sub-70 nm resolution tabletop microscopy at 13.8 nm using a compact laser-plasma EUV source [J] . Przemyslaw W. Wachulak, Andrzej Bartnik, Henryk Fiedorowicz Optics Letters . 2010,第14期

机译：使用紧凑型激光等离子EUV光源在13.8 nm处具有低于70 nm的分辨率的台式显微镜
2. A compact, quasi-monochromatic laser-plasma EUV source based on a double-stream gas-puff target at 13.8 nm wavelength [J] . P.W. Wachulak, rnA. Bartnik, rnH. Fiedorowicz, Applied physics . 2010,第3期

机译：紧凑的准单色激光等离子EUV源，基于波长为13.8 nm的双流气嘴目标
3. A compact, quasi-monochromatic laser-plasma EUV source based on a double-stream gas-puff target at 13.8 nm wavelength [J] . P. W. Wachulak, A. Bartnik, H. Fiedorowicz, Applied Physics B: Lasers and Optics . 2010,第3期

机译：紧凑的准单色激光等离子EUV源，基于波长为13.8 nm的双流气嘴目标
4. EUV imaging with a 13 nm tabletop laser reaches sub-38 nm spatial resolution [C] . Georgiy Vaschenko, Ferno Brizuela, Courtney Brewer, Emerging Lithographic Technologies X pt.1 . 2006

机译：使用13 nm台式激光器的EUV成像可达到38 nm以下的空间分辨率
5. EUV Microscopy with a Tabletop High Harmonic Generation Source: Generalizing Coherent Diffractive Imaging to Extended Samples in Transmission, Reection, and Hyperspectral Modalities. [D] . Zhang, Bosheng. 2015

机译：具有台式高谐波产生量的EUV显微镜来源：将相干衍射成像推广到透射，反射和高光谱模态中的扩展样品。
6. Optical coherence tomography (OCT) with 2 nm axial resolution using a compact laser plasma soft X-ray source [O] . Przemysław Wachulak, Andrzej Bartnik, Henryk Fiedorowicz -1

机译：使用紧凑型激光等离子体软X射线源的2 axialnm轴向分辨率的光学相干断层扫描（OCT）
7. Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light [O] . G. Vaschenko, C. Brewer, F. Brizuela, 2006

机译：具有13nm波长激光的亚38nm分辨率桌面显微镜显微镜

Sub-70 nm resolution tabletop microscopy at 13.8 nm using a compact laser–plasma EUV source

摘要

著录项

相似文献

相关主题

期刊订阅