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首页> 外文期刊>精密工学会誌 >PROFILE MEASUREMENT WITH NO STANDARD - MEASURING EXPERIMENT OF FLATNESS ALONG A CIRCLE USING A FIZEAU-INTERFEROMETER-
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PROFILE MEASUREMENT WITH NO STANDARD - MEASURING EXPERIMENT OF FLATNESS ALONG A CIRCLE USING A FIZEAU-INTERFEROMETER-

机译：无需任何标准的轮廓测量-使用FIZEAU干涉仪测量圆周上的平整度实验

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摘要

This paper describes a measurement of surface flatness along a circle with no standard. For the measurement, distances of the space between two unknown surfaces located almost in parallel are measured along a circle. One of the surfaces is rotated the center of the circle an the distances are measured again. This procedure is repeated many times. The profiles of two surfaces along a circle are calculated from these data. Validity of this measuring principle was proved by computer simulations and simple measuring experiments in the former paper. In this study the principle is applied to measurement using a Fizeau interferometer with He-Ne laser. For the purpose, a high precision mirror and a metal-coated glass are used for the upper and lower reflection surfaces respectively. Their profiles are unknown. The distances between two surfaces are obtained by the interference fringes Fourier transform method is used to obtain the distances smaller than one fringe . Two profiles are calculated from the data. Profile measurements are carried out four times using four different metal-coated glass plates as the lower surface and a precise mirror as the upper surface. The measured profiles of the precise mirror obtained by these procedures agree well with a deviation of about 2 nm.
机译：本文介绍了没有标准的沿圆的表面平整度的测量。为了进行测量，沿着圆周测量了几乎平行的两个未知表面之间的空间距离。将其中一个表面旋转到圆心，然后再次测量距离。重复此过程很多次。从这些数据计算出沿一个圆的两个表面的轮廓。在前一篇论文中，通过计算机仿真和简单的测量实验证明了该测量原理的有效性。在这项研究中，该原理适用于使用带氦氖激光器的Fizeau干涉仪进行测量。为此，上反射镜和下反射镜分别使用高精度镜和镀金属玻璃。他们的个人资料未知。通过干涉条纹求出两个表面之间的距离。用傅立叶变换法获得小于一个条纹的距离。从数据计算出两个轮廓。使用四个不同的镀金属玻璃板作为下表面，并使用精密镜作为上表面进行四次轮廓测量。通过这些程序获得的精密反射镜的测量轮廓与约2 nm的偏差非常吻合。

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