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Two-stage decoupled micro-machined gyroscope and noncontact vibration test

机译:两级解耦微加工陀螺仪和非接触振动测试

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摘要

By introducing the working principle of the two-stage decoupled micro-machined gyroscope, the vibration equation of the driving mode is established. Using Laplace transform, the differential equation and the analytical solution are solved, and the amplitude-frequency characteristics of the driving mode are obtained. Moreover, this article introduces the hardware of the noncontact vibration measurement system and the algorithm. By experiments, the characteristic of vibration of the tested micro-machined gyroscope is obtained. Experimental results indicate that the precision of the amplitude is 0.1 μm, and the two-stage decoupled micro-machined gyroscope is immune to mechanical coupling and has high linearity inherently.
机译:通过介绍两级解耦微机械陀螺仪的工作原理,建立了驱动模式的振动方程。利用拉普拉斯变换求解微分方程和解析解,得到驱动模式的幅频特性。此外,本文介绍了非接触式振动测量系统的硬件和算法。通过实验,获得了被测微机械陀螺仪的振动特性。实验结果表明,振幅精度为0.1μm,两级解耦微加工陀螺仪不受机械耦合的影响,固有地具有很高的线性度。

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  • 作者单位

    Mechanical Engineering College, Taiyuan University of Science and Technology, 66 Waliu Street, Wanbailin District, Taiyuan, Shanxi 030024, PR China,School of Mechatronical Engineering, Beijing Institute of Technology, Beijing, PR China;

    School of Mechatronical Engineering, Beijing Institute of Technology, Beijing, PR China;

    Department of Computer Engineering, Taiyuan University, Taiyuan, PR China;

    School of Mechatronical Engineering, Beijing Institute of Technology, Beijing, PR China;

    School of Mechatronical Engineering, Beijing Institute of Technology, Beijing, PR China;

    School of Mechatronical Engineering, Beijing Institute of Technology, Beijing, PR China;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Decoupling; micro-machined gyroscope; noncontact; vibration; measurement;

    机译:去耦;微机械陀螺仪非接触振动;测量;

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