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首页> 外文期刊>Review of Scientific Instruments >Production of electron cyclotron resonance plasma by using multifrequencies microwaves and active beam profile control on a large bore electron cyclotron resonance ion source with permanent magnets a
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Production of electron cyclotron resonance plasma by using multifrequencies microwaves and active beam profile control on a large bore electron cyclotron resonance ion source with permanent magnets a

机译：a 在具有大磁体的大口径电子回旋共振离子源上利用多频微波和有源束轮廓控制产生电子回旋共振等离子体

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摘要

A new concept on magnetic field with all magnets on plasma production and confinement has been proposed to enhance efficiency of an electron cyclotron resonance (ECR) plasma for broad and dense ion beam source under the low pressure. The magnetic field configuration is constructed by a pair of magnets assembly, i.e., comb-shaped magnet which cylindrically surrounds the plasma chamber. The resonance zones corresponding to the fundamental ECR for 2.45 GHz and 11–13 GHz frequencies are constructed at different positions. The profiles of the plasma parameters in the ECR ion source are different from each frequency of microwave. Large bore extractor is set at the opposite side against the microwave feeds. It is found that differences of their profiles also appear at those of ion beam profiles. We conducted to launch simultaneously multiplex frequencies microwaves controlled individually, and tried to control the profiles of the plasma parameters and then those of extracted ion beam. © 2010 American Institute of Physics Article Outline INTRODUCTION EXPERIMENTAL APPARATUS EXPERIMENTAL RESULTS AND DISCUSSIONS ECRIS plasma characteristics in single frequency microwave Controlling spatial profiles of plasma parameters by multifrequencies microwaves Controlling ion beam profiles by multifrequencies microwaves FUTURE PLANNING
机译：为了提高低压下宽而密集的离子束源的电子回旋共振（ECR）等离子体的效率，提出了一种在所有磁体上产生和限制等离子体的磁场新概念。磁场结构由一对磁体组件构成，即，圆柱形地围绕等离子体室的梳形磁体。与2.45 GHz和11–13 GHz频率的基本ECR相对应的谐振区位于不同的位置。 ECR离子源中等离子体参数的分布与微波的每个频率都不同。大口径提取器位于与微波进料相对的一侧。发现它们的轮廓的差异也出现在离子束轮廓的轮廓上。我们进行了同时发射分别控制的多路复用微波，并试图控制等离子体参数的轮廓，然后控制提取离子束的轮廓。 ©2010美国物理研究所文章大纲引言实验仪器实验结果和讨论单频微波中的ECRIS等离子体特性通过多频微波控制等离子体参数的空间分布通过多频微波控制离子束分布的未来计划

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