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Production of large resonant plasma volumes in microwave electron cyclotron resonance ion sources
Production of large resonant plasma volumes in microwave electron cyclotron resonance ion sources
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机译：在微波电子回旋共振离子源中产生大量共振等离子体
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摘要
Microwave injection methods for enhancing the performance of existing electron cyclotron resonance (ECR) ion sources. The methods are based on the use of high-power diverse frequency microwaves, including variable- frequency, multiple-discrete-frequency, and broadband microwaves. The methods effect large resonant "volume" ECR regions in the ion sources. The creation of these large ECR plasma volumes permits coupling of more microwave power into the plasma, resulting in the heating of a much larger electron population to higher energies, the effect of which is to produce higher charge state distributions and much higher intensities within a particular charge state than possible in present ECR ion sources.
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