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Effect of Environmental Conditions on Quality Factors of MEMS Cantilever Beam Resonator in Gas Rarefaction

机译：环境条件对气体稀释剂中MEMS悬臂梁谐振器质量因子的影响

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摘要

This paper discussed the effect of environmental conditions (moisture and temperature)on the quality factors (Q-factor) of micro-electro-mechanical systems(MEMS) cantilever beam resonators in wide range of gas rarefaction (pressure (p),and accommodation coefficients (ACs)), and flexural mode of resonator. The modifiedmolecular gas lubrication (MMGL) equation is applied for modeling the dominantsqueeze film damping (SFD) problem on the quality factor of MEMS cantileverbeam resonators to discuss the effect of environmental conditions. The external SFDand the internal structure damping (thermoelastic damping) and support loss) areaccurately taken into account. Effective viscosity, which is ratio of dynamic viscosityand Poiseuille flow rate of moist air, is utilized to modify the MMGL equationto consider the environmental effects of moisture and temperature in gas rarefaction.In low pressures, mean free path changes more significantly with relative humidityand temperature than that of dynamic viscosity of moisture in gas rarefaction.Thus, effect of environmental conditions such as moisture and temperature must bediscussed to improve Q-factors of MEMS cantilever beam resonators in wide rangeof gas rarefaction (p and ACs) and flexural modes of resonator. The results showedthat Q-factor of SFD decreases significantly as moisture and temperature increaseat higher gas rarefaction (lower p, and ACs), while Q-factor of SFD decreases andthen increases slightly as moisture and temperature increase at lower gas rarefaction(higher p, and ACs). The total Q-factor is highly sensitive to the relative humidityand temperature in higher gas rarefaction (lower p and ACs) and lower flexuralmodes of resonator.
机译：本文讨论了环境条件（水分和温度）的影响关于微机电系统的质量因素（Q系子）（MEMS）悬臂梁谐振器在宽范围的气体稀疏（压力（P），和住宿系数（ACS））和谐振器的弯曲模式。修改了应用分子气体润滑（MMGL）方程用于建模主导MEMS悬臂的质量因子挤压膜阻尼（SFD）问题梁谐振器讨论环境条件的影响。外部SFD和内部结构阻尼（热弹性阻尼）和支持损失）是准确考虑。有效粘度，是动态粘度的比例和Poiseuille流量的潮湿空气，用于修改MMGL方程考虑水分和温度在气体稀疏的环境影响。在低压下，平均自由路径随着相对湿度而变化更大而温度高于气体稀疏的动态粘度的温度。因此，环境条件如水分和温度的影响必须是讨论在宽范围内改善MEMS悬臂梁谐振器的Q因子气体稀疏（P和ACS）和谐振器的弯曲模式。结果表明SFD的Q系数显着降低，因为水分和温度增加在较高的气体稀释（下P和ACS），而SFD的Q系数降低和然后随着较低气体稀疏的水分和温度升高而略微增加（更高的P和ACS）。总Q系数对相对湿度高度敏感和较高气体稀疏（下部P和ACS）和较低弯曲的温度谐振器模式。

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  • 来源
    《Sensing and imaging》 |2021年第1期|6.1-6.27|共27页
  • 作者

    Minh Truong Phan; Xuan Thang Trinh; Quoc Cuong Le; Vo Ke Thanh Ngo; Chi Cuong Nguyen;

  • 作者单位

    Institute for Computational Science and Technology Room 311(A&B) SBI building Quang Trung Software City Tan Chanh Hiep ward District 12 Ho Chi Minh City Vietnam;

    The Research Laboratories of Saigon High-Tech-Park Lot I3 N2 Street Saigon Hi‑Tech‑Park District 9 Ho Chi Minh City Vietnam;

    Department of Information and Communications 59 Ly Tu Trong street Ben Nghe ward District 1 Ho Chi Minh City Vietnam;

    The Research Laboratories of Saigon High-Tech-Park Lot I3 N2 Street Saigon Hi‑Tech‑Park District 9 Ho Chi Minh City Vietnam;

    Institute for Computational Science and Technology Room 311(A&B) SBI building Quang Trung Software City Tan Chanh Hiep ward District 12 Ho Chi Minh City Vietnam The Research Laboratories of Saigon High-Tech-Park Lot I3 N2 Street Saigon Hi‑Tech‑Park District 9 Ho Chi Minh City Vietnam;

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  • 关键词

    Quality factor; MEMS cantilever beam resonators; Temperature; Relative humidity; Gas rarefaction; Flexural mode of resonator;

    机译：品质因素;MEMS悬臂梁谐振器;温度;相对湿度;气体稀疏;谐振器的弯曲模式;

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