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Effect of gas rarefaction on the quality factors of micro-beam resonators

机译：气体稀疏对微束谐振器质量因子的影响

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The external squeeze film damping (SFD) of microelectromechanical systems (MEMS) resonators is a dominant factor to lower the quality factor (Q-factor) due to their large surface area to volume ratio and small spacing. To improve the Q-factor of MEMS resonators, the effect of gas rarefaction (low gas ambient pressure in thin gas film thickness) or operating in higher mode should be considered in SFD analysis. The modified molecular gas lubrication (MMGL) equation is applied for modeling the SFD with gas rarefaction effects taken into consideration. The effects of inverse Knudsen number, surface accommodation coefficients (ACs) and operating frequency on SFD are discussed. The combined effects of SFD, thermoelastic damping (TED) and anchor loss on the total Q-factors of MEMS resonators are considered. The contribution of SFD on the total Q-factor (weighting of SFD) is also discussed. The results show that weighting of SFD could be decrease at low inverse Knudsen number or low ACs or operating at high resonant frequencies.
机译：微机电系统（MEMS）谐振器的外部挤压膜阻尼（SFD）是由于其大的表面积与体积比和小间隔而降低质量因子（Q系数）的显着因子。为了改善MEMS谐振器的Q因子，应在SFD分析中考虑气体稀释（薄气体膜厚度低的气体环境压力低）或以更高模式操作的影响。施加改性的分子气体润滑（MMGL）方程用于将SFD与考虑的气体稀疏效应进行建模。讨论了逆knudsen号，表面容纳系数（ACS）和操作频率对SFD的影响。考虑了SFD，热弹性阻尼（TED）和锚损耗对MEMS谐振器的总Q因子的综合影响。还讨论了SFD对总Q因子的贡献（SFD的加权）。结果表明，SFD的加权可以在低反向滚子数或低ACs处减少或在高谐振频率下操作。

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