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Microfluidic chips for capillary electrophoresis with integrated electrodes for capacitively coupled conductivity detection based on printed circuit board technology

机译:毛细管电泳微流控芯片,带有集成电极,用于基于印刷电路板技术的电容耦合电导检测

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A simple and low budget microfabrication method compatible with mass production was developed for the integration of electrodes for capacitively coupled contactless conductivity detection (C4D) in Lab on a Chip devices. Electrodes were patterned on a printed circuit board using standard processing. This was followed by lamination-photolithography-lamination to cover the electrodes in dry film photoresist (DFR) using an office laminator. This resulted in a flush, smooth surface on top of the detection electrodes, enabling subsequent integration of a microfluidic network at a distance dictated by the thickness of the DFR (17 μm, 30 μm and 60 μm were used in this work). This process was applied to create two types of detectors, re-usable detectors to be used in combination with a separate microfluidic network and integrated detectors where the microfluidic network is irreversibly sealed to the detector. A poly(dimethylsiloxane) (PDMS) slab containing the microfluidic network was positioned on top of the re-usable detectors to create the PDMS hybrid devices. The integrated DFR devices were created by patterning and sealing the microchannel in DFR using subsequent lamination and lithographic steps. The sensitivity of the C4D made using this new technology for small inorganic cations was between 6 and 20 μM, which is comparable with devices made using significantly more advanced technologies. Where the 17μm film slightly improved the sensitivity, the use of 30μm thick insulating films was preferred as these did not impose significant restrictions on the applicable field strengths.
机译:开发了一种与批量生产兼容的简单且低成本的微细加工方法,用于在芯片实验室中集成用于电容耦合非接触电导率检测(C4D)的电极。使用标准工艺在印刷电路板上对电极进行构图。随后进行层压-光刻-层压以使用办公室层压机覆盖干膜光刻胶(DFR)中的电极。这在检测电极的顶部形成了一个平整,光滑的表面,从而可以在DFR的厚度所指定的距离(此工作中使用17μm,30μm和60μm)下实现微流体网络的后续集成。应用此过程可创建两种类型的检测器,可重复使用的检测器与单独的微流体网络结合使用,以及集成的检测器,其中微流体网络不可逆地密封在检测器上。将包含微流体网络的聚二甲基硅氧烷(PDMS)平板放置在可重复使用的检测器的顶部,以创建PDMS混合设备。通过使用后续层压和光刻步骤在DFR中对微通道进行图案化和密封,可以创建集成的DFR器件。使用这种新技术制成的C4D对小的无机阳离子的灵敏度在6到20μM之间,这与使用明显更先进的技术制成的设备相当。在17μm的膜稍微提高灵敏度的地方,最好使用30μm厚的绝缘膜,因为它们不会对适用的场强施加明显的限制。

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