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首页> 外文期刊>Sensors and Actuators. B, Chemical >MEMS-based microelectrode system incorporating carbon nanotubes for ionization gas sensing
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MEMS-based microelectrode system incorporating carbon nanotubes for ionization gas sensing

机译：包含碳纳米管的基于MEMS的微电极系统，用于电离气体传感

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摘要

A novel microelectrode system incorporating CNTs with some short gap sizes (5=6, 7, 8, 10, 12 μm) that can generate non-thermal plasmas without high voltage operation and additional ionization sources is introduced in this paper. The characteristic current-voltage (I-V) and current-time (I-t) in the discharge process exhibit some self-protecting behaviors from the thermal plasma generation, which is similar to the dielectric barrier discharges. The threshold effects, which are sensitive to the gap size and gas species, definitely exist in the micro discharges in the electrode with a micrometer gap size and one-dimensional materials. As gas sensors that can monitor gas species and concentration at the atmospheric pressure, the sensitivity, selectivity and stability issues are tested. The results show the significantly improved performance, including the safe operation voltage (around 36 V), higher accuracy and selectivity, over the conventional device operated by the same principle. Furthermore, the device is facile to be realized using the microelectromechanical system (MEMS) fabrication technology, thanks to its chip-based nature. Additionally, the underlying physics are also under scrutiny in this paper in light of the fluid model of the discharge.
机译：本文介绍了一种新颖的微电极系统，该系统结合了具有短间隙尺寸（5 = 6、7、8、10、12μm）的CNT，可以在没有高压操作的情况下产生非热等离子体，并引入了其他电离源。放电过程中的特征电流-电压（I-V）和电流时间（I-t）表现出一些对热等离子体产生的自我保护行为，这与介电势垒放电类似。对间隙尺寸和气体种类敏感的阈值效应肯定存在于具有微米间隙尺寸和一维材料的电极中的微放电中。作为可以在大气压下监视气体种类和浓度的气体传感器，测试了灵敏度，选择性和稳定性问题。结果表明，与以相同原理操作的常规器件相比，该器件的性能得到了显着改善，包括安全工作电压（约36 V），更高的精度和选择性。此外，由于其基于芯片的特性，该设备易于使用微机电系统（MEMS）制造技术来实现。此外，根据放电的流体模型，本文还将对基础物理学进行审查。

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