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首页> 外文期刊>IEEE Journal of Solid-State Circuits >Series-resonant VHF micromechanical resonator reference oscillators
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Series-resonant VHF micromechanical resonator reference oscillators

机译：串联谐振VHF微机械谐振器参考振荡器

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摘要

Series-resonant vibrating micromechanical resonator oscillators are demonstrated using a custom-designed single-stage zero-phase-shift sustaining amplifier together with planar-processed micromechanical resonator variants with quality factors Q in the thousands that differ mainly in their power-handling capacities. The resonator variants include two 40-Μm-long 10-MHz clamped-clamped-beam (CC-beam) resonators, one of them much wider than the other so as to allow larger power-handling capacity, and a 64-Μm-diameter 60-MHz disk resonator that maximizes both Q and power handling among the resonators tested. Tradeoffs between Q and power handling are seen to be most important in setting the close-to-carrier and far-from-carrier phase noise behavior of each oscillator, although such parameters as resonant frequency and motional resistance are also important. With a 10× higher power handling capability than the wide-width CC-beam resonator, a comparable series motional resistance, and a 45× higher Q of 48 000, the 60-MHz wine glass resonator reference oscillator exhibits a measured phase noise of -110 dBc/Hz at 1-kHz offset, and -132 dBc/Hz at far-from-carrier offsets. Dividing down to 10 MHz for fair comparison with a common conventional standard, this oscillator achieves a phase noise of -125 dBc/Hz at 1-kHz offset, and -147 dBc/Hz at far-from-carrier offsets.
机译：演示了使用定制设计的单级零相移维持放大器以及平面处理的微机械谐振器变体，其品质因数Q达到数千，主要区别在于其功率处理能力，从而证明了串联谐振的振动微机械谐振器振荡器。谐振器的变体包括两个40Mm长的10MHz钳位夹式（CC-beam）谐振器，其中一个比另一个宽得多，以允许更大的功率处理能力，并且直径为64μm 60 MHz磁盘谐振器，在测试的谐振器中最大化Q和功率处理。在设置每个振荡器的接近载波和远离载波的相位噪声行为时，Q和功率处理之间的折衷被认为是最重要的，尽管诸如谐振频率和运动阻抗的参数也很重要。与宽幅CC光束谐振器相比，其功率处理能力高出10倍，串联运动电阻可比，Q值高出45倍，即48 000，该60 MHz酒杯谐振器参考振荡器表现出的相位噪声为- 1 kHz偏移时为110 dBc / Hz，远离载波偏移时为-132 dBc / Hz。为了公平地与常见的常规标准进行比较，该振荡器被划分为10 MHz，在1kHz偏移时达到-125 dBc / Hz的相位噪声，而在远离载波偏移时达到-147 dBc / Hz。

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