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首页> 外文期刊>IEEE Journal of Solid-State Circuits >A gate-coupled PTLSCR/NTLSCR ESD protection circuit for deep-submicron low-voltage CMOS ICs
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A gate-coupled PTLSCR/NTLSCR ESD protection circuit for deep-submicron low-voltage CMOS ICs

机译:用于深亚微米低压CMOS IC的栅极耦合PTLSCR / NTLSCR ESD保护电路

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摘要

A novel electrostatic discharge (ESD) protection circuit, which combines complementary low-voltage-triggered lateral SCR (LVTSCR) devices and the gate-coupling technique, is proposed to effectively protect the thinner gate oxide of deep submicron CMOS ICs without adding an extra ESD-implant mask. Gate-coupling technique is used to couple the ESD-transient voltage to the gates of the PMOS-triggered/NMOS-triggered lateral silicon controlled rectifier (SCR) (PTLSCR/NTLSCR) devices to turn on the lateral SCR devices during an ESD stress. The trigger voltage of gate-coupled lateral SCR devices can be significantly reduced by the coupling capacitor. Thus, the thinner gate oxide of the input buffers in deep-submicron low-voltage CMOS ICs can be fully protected against ESD damage. Experimental results have verified that this proposed ESD protection circuit with a trigger voltage about 7 V can provide 4.8 (3.3) times human-body-model (HBM) [machine-model (MM)] ESD failure levels while occupying 47% of layout area, as compared with a conventional CMOS ESD protection circuit.
机译:提出了一种新颖的静电放电(ESD)保护电路,该电路结合了互补的低压触发横向SCR(LVTSCR)器件和栅极耦合技术,可有效保护深亚微米CMOS IC的较薄栅极氧化物,而无需添加额外的ESD -植入式面罩。栅极耦合技术用于将ESD瞬态电压耦合到PMOS触发/ NMOS触发的横向可控硅(SCR)(PTLSCR / NTLSCR)器件的栅极,以在ESD应力期间开启横向SCR器件。栅极耦合的横向SCR器件的触发电压可以通过耦合电容器大大降低。因此,可以充分保护深亚微米低压CMOS IC中输入缓冲器的较薄栅极氧化物。实验结果证明,该建议的ESD保护电路具有约7V的触发电压,可提供4.8(3.3)倍的人体模型(HBM)[机器模型(MM)] ESD故障等级,同时占据47%的布局面积与传统的CMOS ESD保护电路相比。

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