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Radiation-enhanced gate-induced-drain-leakage current in the 130 nm partially-depleted SOI pMOSFET

机译:130 nm部分耗尽的SOI pMOSFET中的辐射增强型栅极感应的漏漏电流

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摘要

The total ionizing dose (TID) effect of the pMOSFET from 130 nm partially-depleted silicon-on-insulator (PDSOI) is investigated. The data obtained from ~(60)Co γ-ray irradiation experiments indicate that input/ output (I/O) device is more susceptible to TID effect than the core device. An anomalous off-state leakage increase is observed for I/O pMOSFET when drain is biased at a high voltage after irradiation. It is proved that this radiation-induced leakage relates to the enhanced gate-induce-drain-leakage (CIDL). Both the radiation-induced interface traps at the gate-oxide/body interface and the oxide trapped charges in the buried oxide (BOX) are responsible for the growth of the leakage current. These conclusions are also verified by the TCAD simulations. The isothermal annealing can recover the leakage current to the pre-irradiation level.
机译:研究了部分耗尽130 nm绝缘体上硅(PDSOI)的pMOSFET的总电离剂量(TID)效应。从〜(60)Coγ射线辐照实验获得的数据表明,输入/输出(I / O)设备比核心设备更容易受到TID效应的影响。当在辐照之后将漏极偏置在高电压下时,对于I / O pMOSFET会观察到异常的关态泄漏增加。事实证明,这种辐射引起的泄漏与增强的栅诱导漏泄漏(CIDL)有关。栅氧化物/体界面处的辐射诱导界面陷阱和掩埋氧化物(BOX)中的氧化物陷阱电荷都与泄漏电流的增长有关。 TCAD仿真也验证了这些结论。等温退火可以将泄漏电流恢复到辐照前的水平。

著录项

  • 来源
    《Solid-State Electronics》 |2015年第4期|81-86|共6页
  • 作者单位

    State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China;

    State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China;

    State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China;

    State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China;

    State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China;

    State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Band-to-band tunneling; Gate-induced-drain-leakage; Partially-depleted silicon-on-insulator; Simulation; Total ionizing dose;

    机译:带间隧道门极引起的漏电泄漏;部分耗尽绝缘体上硅;模拟;总电离剂量;

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