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Mechanical and tribological characterisation of nanostructured Ti/TiB2 multilayer films

机译：纳米Ti / TiB 2 多层膜的力学和摩擦学表征

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摘要

Ti/TiB2 nanomultilayer thin films with different bilayer thicknesses λ were deposited onto unheated Si(100) wafers (for mechanical analyses) and AISI M42 tool steels (for tribological measurements) by unbalanced dc magnetron sputtering. The effects of different λ values on mechanical and tribological properties were investigated. These films were characterised and analysed in terms of their hardness by microindentation measurements, their surface root mean square roughness by AFM, their stress by an optical interference method, and their friction and wear behaviors by Rockwell-C testing, nano-/micro-scratch testing, dynamic impact testing and pin on disc tribometer. It was found that the mechanical and tribological properties of multilayer films (typically 1˙58±0˙10 µm in thickness) were closely related to λ (varied from 1˙1 to 9˙8 nm). For the best multilayer film with λ51˙9 nm, a maximum hardness of ∼32˙5 GPa was achieved and the best cohesive and adhesive strength was evidenced in terms of critical load values of LC1 (∼26 N) and LC2 (∼62 N). Moreover, by dynamic impact testing this multilayer film could endure impact cycles up to 4 × 105 without adhesive failure. However, when the λ was further decreased to 1˙1 nm, the hardness, cohesive and adhesive strength were decreased due to a high level of intermixing and lack of a layered structure. It was also found that the nanoscratch test under single pass and constant load conditions showed that the frictional coefficients decreased with λ and increased with normal load due to the ploughing effect. The enhanced hardness in the multilayer films with small λ values improved the wear resistance and lowered the frictional coefficients. These adhesive properties and wear performance are also discussed on the basis of mechanical properties and wear mechanisms.
机译：通过不平衡直流磁控溅射将具有不同双层厚度λ的Ti / TiB 2 纳米多层薄膜沉积到未加热的Si（100）晶片（用于机械分析）和AISI M42工具钢（用于摩擦学测量）上。研究了不同λ值对机械和摩擦学性能的影响。通过微压痕测量对这些膜进行表征和分析，包括硬度，AFM的表面均方根粗糙度，光学干涉法的应力，Rockwell-C测试，纳米/微划痕的摩擦和磨损行为测试，动态冲击测试和销盘摩擦计。结果发现，多层膜的机械和摩擦学性能（厚度通常为1˙58±0˙10μm）与λ（在1˙1至9˙8nm之间变化）密切相关。对于具有λ51˙9nm的最佳多层膜，最大硬度达到〜32˙5GPa，并且根据L C1 的临界载荷值证明了最佳的内聚力和粘合强度（〜26 N）和L C2 （〜62 N）。此外，通过动态冲击测试，该多层膜可以承受高达4×10 5 的冲击循环，而不会发生胶粘剂破坏。然而，当λ进一步减小至1˙1nm时，由于高水平的混合和缺乏层状结构，导致硬度，内聚力和粘合强度降低。还发现，在单次通过和恒定载荷条件下的纳米划痕试验表明，由于耕作效果，摩擦系数随λ减小而随法向载荷增大。 λ值小的多层膜硬度提高，耐磨性提高，摩擦系数降低。还根据机械性能和磨损机理来讨论这些粘合性能和磨损性能。

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