• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Thin Solid Films >Morphology and crystal texture in tilted columnar micro-structured titanium thin film coatings
【24h】

Morphology and crystal texture in tilted columnar micro-structured titanium thin film coatings

机译：倾斜柱状微结构钛薄膜涂层的形貌和晶体织构

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

Titanium thin films deposited at various polar incidence angles by electron-beam evaporation are investigated by electron microscopy and X-ray diffraction pole-figures. The resulting film morphology and texture are shown to be strongly affected by the vapor flux direction. At normal incidence deposition angle, a fiber texture forms, with the c-axis of Ti crystallites aligned parallel to the surface normal with random in-plane (azimuthal) orientation. At off-normal deposition angles, porous morphologies with inclined micro-columns form. The texture of these films is an inclined fiber texture, where the texture tilt angle increases with increasing deposition angle. Biaxial texture is observed for films grown at polar incidence angles larger than 60 degrees. The micro-column tilt axis, and the c-axis of the crystallites, both lie in the deposition plane but at different polar angles; the mechanism behind micro-column tilt is due to the shadowing effect, whereas the fiber texture tilt angle and the biaxial texture orientations of the films result from evolutionary crystal growth, determined by the kinetic growth habits of crystallites.
机译：通过电子显微镜和X射线衍射极图研究了通过电子束蒸发以各种极性入射角沉积的钛薄膜。所显示的薄膜形态和质地受蒸汽通量方向的强烈影响。在法向入射沉积角处，会形成纤维织构，其中Ti晶粒的c轴平行于表面法线，且具有随机的面内（方位角）方向。在偏离法线的沉积角度下，会形成带有倾斜微柱的多孔形态。这些薄膜的纹理是倾斜的纤维纹理，其中纹理倾斜角随沉积角的增加而增加。对于以大于60度的极性入射角生长的薄膜，观察到双轴织构。微柱的倾斜轴和微晶的c轴均位于沉积平面中，但极性不同。微柱倾斜的背后机制是由于阴影效应，而薄膜的纤维织构倾斜角和双轴织构取向则是由晶体的动态生长习性决定的，而晶体的生长是由晶体的生长引起的。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号