Deuterium influence on optical gap of amorphous carbon diamond-like carbon (DLC) thin film

N. Mathis; C. Meunier; F. Munnik; S. Mikhailov

首页> 外文期刊>Thin Solid Films >Deuterium influence on optical gap of amorphous carbon diamond-like carbon (DLC) thin film

【24h】

Deuterium influence on optical gap of amorphous carbon diamond-like carbon (DLC) thin film

机译：氘对非晶碳类金刚石碳（DLC）薄膜光学间隙的影响

获取原文

获取原文并翻译 | 示例

掌桥外文数据库（机构版） >>

开具论文收录证明 >>

文献代查 >>

页面导航

摘要
著录项
相似文献
相关主题

摘要

This present study aims to determine the hydrogen influence on the electrical gap of diamond-like carbon (DLC) film. DLC thin layers were deposited on silicon wafer by plasma enhanced chemical vapour deposition (PECVD). With this method we obtain a a-C:H

机译：本研究旨在确定氢对类金刚石碳（DLC）薄膜电间隙的影响。通过等离子体增强化学气相沉积（PECVD）在硅晶片上沉积DLC薄层。通过这种方法，我们得到a-C：H

著录项

来源
《Thin Solid Films》 |2008年第7期|p.1508-1511|共4页
作者
N. Mathis; C. Meunier; F. Munnik; S. Mikhailov;
展开▼
作者单位

FEMTO-ST, CREST, CNRS-UMR 6174, 4 place Tharradin, BP 71427, 25211 Montbeliard, France;

展开▼
收录信息
原文格式 PDF
正文语种 eng
中图分类工程材料学;
关键词
diamond-like carbon; electrical gap; deuterated layer; hydrogen; UV spectroscopy; thin layer; PECVD;

机译：类金刚石碳;电气间隙;氘化层;氢;紫外光谱;薄层;PECVD;

相似文献

外文文献
中文文献
专利

1. On the influence of PDMS (polydimethylsiloxane) substrate surface energy in wrinkling of DLC (diamond-like carbon) thin films [J] . Teixeira Fernanda De Sá, Araújo W. W.R., Gushiken N. K., Journal of Applied Physics . 2017,第13期

机译：PDMS（聚二甲基硅氧烷）基材表面能对DLC（类金刚石碳）薄膜起皱的影响
2. Depth profiling of fluorine-doped diamond-like carbon (F-DLC) film: Localized fluorine in the top-most thin layer can enhance the non-thrombogenic properties of F-DLC [J] . Terumitsu Hasebe, So Nagashima, Aki Kamijo, Thin Solid Films . 2007,第2a4期

机译：掺氟类金刚石碳（F-DLC）膜的深度剖析：最顶层中的局部氟可以增强F-DLC的非血栓形成特性
3. Effect of various CF_4/CH_4 flow ratios on structure and optical band gap of fluorinated diamond-like carbon thin films [J] . Jian Rong Xiao, Tao Tang, Yan Wei Li, Materials science forum . 2011,第PTa1期

机译：CF_4 / CH_4流量比对氟化类金刚石碳薄膜结构和带隙的影响
4. Nano-Wrinkling of Diamond-like Carbon Thin Films on Amorphous Polycarbonate and Semicrystalline Polyethylene Terephthalate [C] . J. M. Lackner, S. Gumus, S. Polat, International Congress in Advances in Applied Physics and Materials Science . 2015

机译：无定形聚碳酸酯和半结晶聚对苯二甲酸乙二醇酯上的金刚石状碳薄膜纳米皱纹
5. Conductivity and Hall effect in diamond-like carbon (DLC) thin films. [D] . Martinez Garcia, Isaac. 2003

机译：类金刚石碳（DLC）薄膜的电导率和霍尔效应。
6. Annealing Effects on Structure and Optical Properties of Diamond-Like Carbon Films Containing Silver [O] . Šarūnas Meškinis, Arvydas Čiegis, Andrius Vasiliauskas, 2016

机译：退火对含银类金刚石碳膜结构和光学性能的影响
7. Diamond, Diamond-Like Carbon (DLC) and Diamond-Like Nanocomposite (DLN) Thin Films for MEMS Applications [O] . T. S., T. K., P. Patel, 2012

机译：金刚石，金刚石碳（DLC）和金刚石纳米复合材料（DLN）薄膜用于MEMS应用
8. Comparative diagnostics of ArF- and KrF-laser generated carbon plumes used for amorphous diamond-like carbon film deposition [R] . Puretzky, A. A. , Geohegan, D. B. , Jellison, G. E. , 1995

机译：用于非晶类金刚石碳膜沉积的arF-和KrF-激光产生的碳羽流的比较诊断

Deuterium influence on optical gap of amorphous carbon diamond-like carbon (DLC) thin film

摘要

著录项

相似文献

相关主题

期刊订阅