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Comparative diagnostics of ArF- and KrF-laser generated carbon plumes used for amorphous diamond-like carbon film deposition

机译：用于非晶类金刚石碳膜沉积的arF-和KrF-激光产生的碳羽流的比较诊断

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A comparative study of ArF- and KrF-laser generated carbon plasmas has been performed under pulsed laser deposition conditions of amorphous diamond-like carbon (DLC) films. Gated-ICCD species-resolved imaging, luminescence spectroscopy and ion probe diagnostics have revealed distinct differences between the carbon plumes generated by ArF- and KrF-lasers. KrF-laser (6.7 J/cm(sup 2)) irradiation produces a less energetic carbon plasma containing larger amounts of luminescent C(sub 2) compared with ArF-laser ablation at the same energy fluence. Spectroscopic ellipsometry and EELS analysis of the DLC films deposited on Si <100> and NaCl substrates were utilized to characterize the high quality ArF- and KrF-laser deposited films (up to 84% of sp(sup 3) bonded carbon for 7 J/cm(sup 2)-ArF-laser DLC film). The more energetic and highly-atomized ArF-laser carbon plasma appears to be responsible for the better diamond-like properties.

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Puretzky, A. A. ; Geohegan, D. B. ; Jellison, G. E. ; McGibbon, M. M.;
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年度 1995
页码 1-15
总页数 15
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
Diamonds; Excimer Lasers; Graphite; Ablation; Comparative Evaluations; Diagnostic Techniques; Electrical Properties; Laser-Radiation Heating; Optical Properties; Performance; Physical Vapor Deposition; Silicon; Sodium Chlorides; Vapor Deposited Coatings; Meetings;

机译：钻石;准分子激光器;石墨;消融;比较评估;诊断技术;电气特性;激光辐射加热;光学特性;性能;物理气相沉积;硅;氯化钠;气相沉积涂层;会议;

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专利

1. Femtosecond pulsed laser deposition and optical properties of diamond-like amorphous carbon films embedded with sp-bonded carbon chains [J] . Anming Hu, M. Rybachuk, Qing-Bin Lu Diamond and Related Materials . 2008,第7a10期

机译：飞秒脉冲激光沉积和嵌入sp键合碳链的类金刚石无定形碳膜的光学性质
2. Spectroscopic study on the evolution of graphite ablation plume in ECR argon plasma during the deposition of diamond-like carbon films [J] . Z.S. Gong, J. Sun, N. Xu Diamond and Related Materials . 2007,第1期

机译：类金刚石碳膜沉积过程中ECR氩等离子体中石墨烧蚀羽流演变的光谱研究
3. Ion probe diagnostics of laser ablated plumes for thin carbon films deposition [J] . Dwivedi RK., Thareja RK., Singh SP. International Journal of Modern Physics, B. Condensed Matter Physics, Statistical Physics, Applied Physics . 1998,第25期

机译：激光烧蚀羽流用于薄碳膜沉积的离子探针诊断
4. Comparative diagnostics of ArF- and KrF-laser generated carbon plumes used for amorphous diamond-like carbon film deposition~1,2 [C] . A.A.Puretzky, D.B.Geohegan, G.E.Jellison Jr., Symposium F: international conference on laser ablation . 1996

机译：用于无定形金刚石状碳膜沉积的ARF和KRF激光激光产生的碳羽膜的比较诊断〜1,2
5. Plasma deposition of diamond-like carbon and fluorinated amorphous carbon and the resultant properties and structure. [D] . Glew, Alexander David. 2003

机译：类金刚石碳和氟化无定形碳的等离子体沉积及其所产生的特性和结构。
6. The Role of Ambient Gas and Pressure on the Structuring of Hard Diamond-Like Carbon Films Synthesized by Pulsed Laser Deposition [O] . Andrei C. Popescu, George E. Stan, Liviu Duta, 2015

机译：环境气体和压力在脉冲激光沉积合成硬质类金刚石碳膜的结构中的作用
7. Comparative diagnostics of ArF- and KrF-laser generated carbon plumes used for amorphous diamond-like carbon film deposition [O] . A.A. Puretzky, D.B. Geohegan, G.E. Jellison, 1996

机译：用于无定形金刚石状碳膜沉积的ARF和KRF激光产生的碳羽膜的比较诊断

Comparative diagnostics of ArF- and KrF-laser generated carbon plumes used for amorphous diamond-like carbon film deposition

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